Abstract
Total internal reflection microscopy has been applied to image subsurface damage sites in conventionally polished fused-silica flats. This technique can differentiate between surface and subsurface features by changing the illuminating polarization. The method is nondestructive, and no surface preparation is required other than a thorough cleaning of the surface. The intensity distributions in the illuminated region of interest are discussed. The technique has been used successfully as an optical fabrication in-process diagnostic.
© 1994 Optical Society of America
Full Article |
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Figures (9)
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Tables (1)
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Equations (9)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription