OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 22 — Aug. 1, 1994
  • pp: 4993–4996

Direct inclusion of the proximity effect in the calculation of kinoforms

Jörgen Bengtsson  »View Author Affiliations


Applied Optics, Vol. 33, Issue 22, pp. 4993-4996 (1994)
http://dx.doi.org/10.1364/AO.33.004993


View Full Text Article

Enhanced HTML    Acrobat PDF (468 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Within the direct inclusion method the proximity effect is already taken care of when one calculates the kinoform relief, whereas conventionally the proximity effect is compensated for after one has calculated the relief. In particular, when proximity effects are considerable, that is, for small structures, the direct inclusion method is shown to give significantly better results than the conventional two-step method. Provided that the proximity effect is correctly modeled, it is shown that for an 8 × 8 array illuminator nearly perfect uniformity can be achieved even for a kinoform with very small structures.

© 1994 Optical Society of America

History
Original Manuscript: July 15, 1993
Revised Manuscript: December 13, 1993
Published: August 1, 1994

Citation
Jörgen Bengtsson, "Direct inclusion of the proximity effect in the calculation of kinoforms," Appl. Opt. 33, 4993-4996 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-22-4993

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited