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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 22 — Aug. 1, 1994
  • pp: 5159–5165

Inversion of reflection ellipsometric data

John Lekner  »View Author Affiliations


Applied Optics, Vol. 33, Issue 22, pp. 5159-5165 (1994)
http://dx.doi.org/10.1364/AO.33.005159


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Abstract

The dielectric constant of an isotropic homogeneous layer on an isotropic substrate is shown to satisfy a quintic equation, with the coefficients determined by |ρ|2 and Re(ρ), where ρ = r p /r s , is found ellipsometrically. This algebraic equation eliminates many (but not all) of the nonphysical roots in the inversion of ellipsometric data. A simple form is obtained if the angle of incidence is equal to the Brewster angle of the substrate. The problem of inversion for thin films is also discussed.

© 1994 Optical Society of America

History
Original Manuscript: December 28, 1992
Revised Manuscript: January 3, 1994
Published: August 1, 1994

Citation
John Lekner, "Inversion of reflection ellipsometric data," Appl. Opt. 33, 5159-5165 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-22-5159


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References

  1. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  2. J. Lekner, “Ellipsometry of anisotropic media,” J. Opt. Soc. Am. A 10, 1579–1581 (1993). [CrossRef]
  3. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1965).
  4. J. Lekner, Theory of Reflection (Nijhoff/Kluwer, Dordrecht, The Netherlands, 1987).
  5. D. Charlot, A. Maruani, “Ellipsometric data processing: an efficient method and an analysis of the relative errors,” Appl. Opt. 24, 3368–3373 (1985). [CrossRef] [PubMed]
  6. M. C. Dorf, J. Lekner, “Reflection and transmission ellipsometry of a uniform layer,” J. Opt. Soc. Am. A 4, 2096–2100 (1987). [CrossRef]
  7. R. M. A. Azzam, “Simple and direct determination of complex refractive index and thickness of unsupported or embedded thin films by combined reflection and transmission ellipsometry at 45° angle of incidence,” J. Opt. Soc. Am. 73, 1080–1082 (1983). [CrossRef]
  8. R. M. A. Azzam, “Transmission ellipsometry on transparent unbacked or embedded thin films with application to soap films in air,” Appl. Opt. 30, 2801–2806 (1991). [CrossRef] [PubMed]
  9. J. Lekner, “Inversion of transmission ellipsometric data for transparent films,” Appl. Opt. 33, (1994). [CrossRef] [PubMed]
  10. J. Lekner, “Analytic inversion of ellipsometric data for an unsupported nonabsorbing uniform layer,” J. Opt. Soc. Am. A 7, 1875–1877 (1990). [CrossRef]
  11. J. Lekner, “Ellipsometry of a thin film between similar media,” J. Opt. Soc. Am. A 5, 1041–1043 (1988). [CrossRef]
  12. H. Hilton, Plane Algebraic Curves (Clarendon, Oxford, 1920).

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