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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 22 — Aug. 1, 1994
  • pp: 5171–5176

Determination of two-dimensional planar displacement by moiré fringes of concentric-circle gratings

Yoon-Chang Park and Seung-Woo Kim  »View Author Affiliations


Applied Optics, Vol. 33, Issue 22, pp. 5171-5176 (1994)
http://dx.doi.org/10.1364/AO.33.005171


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Abstract

We investigate the moiré fringe pattern of two concentric-circle gratings with the aim of measuring the relative two-dimensional planar displacement induced between the gratings. In the first stage we give a comprehensive mathematical approach for the analysis of fringe patterns. Then we suggest a fast computational measurement algorithm that uses a Fourier transformation technique. Finally, our experimental results prove that a measuring accuracy of 0.01 μm can be achieved with this method.

© 1994 Optical Society of America

History
Original Manuscript: August 20, 1993
Revised Manuscript: December 14, 1993
Published: August 1, 1994

Citation
Yoon-Chang Park and Seung-Woo Kim, "Determination of two-dimensional planar displacement by moiré fringes of concentric-circle gratings," Appl. Opt. 33, 5171-5176 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-22-5171

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