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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 25 — Sep. 1, 1994
  • pp: 5962–5963

Ion-beam-deposited boron carbide coatings for the extreme ultraviolet

G. M. Blumenstock and Ritva A. M. Keski-Kuha  »View Author Affiliations


Applied Optics, Vol. 33, Issue 25, pp. 5962-5963 (1994)
http://dx.doi.org/10.1364/AO.33.005962


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Abstract

The normal-incidence reflectance of ion-beam-deposited boron carbide thin films has been evaluated in the extreme ultraviolet (EUV) spectral region. High-reflectance coatings have been produced with reflectances greater than 30% between 67 and 121.6 nm. This high reflectance makes ion-beam-deposited boron carbide an attractive coating for EUV applications.

© 1994 Optical Society of America

History
Original Manuscript: November 8, 1993
Revised Manuscript: April 21, 1994
Published: September 1, 1994

Citation
G. M. Blumenstock and Ritva A. M. Keski-Kuha, "Ion-beam-deposited boron carbide coatings for the extreme ultraviolet," Appl. Opt. 33, 5962-5963 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-25-5962


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