A method is developed for the quantitative assessment of microlens deficiencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obtained and tolerable imperfections are deduced for the practical effort-saving fabrication of high-performance micro-optical elements.
© 1994 Optical Society of America
Original Manuscript: August 9, 1993
Revised Manuscript: March 31, 1994
Published: November 1, 1994
Z. L. Liau, D. W. Nam, and R. G. Waarts, "Tolerances in microlens fabrication by multilevel etching and mass-transport smoothing," Appl. Opt. 33, 7371-7376 (1994)