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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 31 — Nov. 1, 1994
  • pp: 7371–7376

Tolerances in microlens fabrication by multilevel etching and mass-transport smoothing

Z. L. Liau, D. W. Nam, and R. G. Waarts  »View Author Affiliations


Applied Optics, Vol. 33, Issue 31, pp. 7371-7376 (1994)
http://dx.doi.org/10.1364/AO.33.007371


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Abstract

A method is developed for the quantitative assessment of microlens deficiencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obtained and tolerable imperfections are deduced for the practical effort-saving fabrication of high-performance micro-optical elements.

© 1994 Optical Society of America

History
Original Manuscript: August 9, 1993
Revised Manuscript: March 31, 1994
Published: November 1, 1994

Citation
Z. L. Liau, D. W. Nam, and R. G. Waarts, "Tolerances in microlens fabrication by multilevel etching and mass-transport smoothing," Appl. Opt. 33, 7371-7376 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-31-7371

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