We show that hydrogen-terminated (111) Si wafers prepared with NH4F-based treatments can serve as a calibration standard for ellipsometers and reflectometers.
© 1994 Optical Society of America
Original Manuscript: November 9, 1993
Revised Manuscript: March 8, 1994
Published: November 1, 1994
T. Yasuda and D. E. Aspnes, "Optical-standard surfaces of single-crystal silicon for calibrating ellipsometers and reflectometers," Appl. Opt. 33, 7435-7438 (1994)