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Applied Optics

Applied Optics


  • Vol. 33, Iss. 31 — Nov. 1, 1994
  • pp: 7477–7488

Microshape and rough-surface analysis by fringe projection

Klaus Leonhardt, Ulrich Droste, and Hans. J. Tiziani  »View Author Affiliations

Applied Optics, Vol. 33, Issue 31, pp. 7477-7488 (1994)

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A fringe-projection system for microscopic applications, fringe-projecting microscopy, is developed and analyzed. Projection of the grating and imaging of the fringe system, modulated by the surface, are accomplished by the same high-aperture objective. The spectrum of the grating is spatially filtered and projected into the aperture with a lateral shift, which leads to a telecentric projection under oblique incidence and telecentric imaging. Topographies of specularly as well as diffusely reflecting surfaces can be obtained. The measurement of highly rough surfaces is described together with preprocessing steps. The resulting intensity distribution of the fringes is analyzed. Formulas for vertical and lateral resolution, measuring range, and dynamic range, based on noise considerations, are presented and verified by topographies of technical surfaces.

© 1994 Optical Society of America

Original Manuscript: March 5, 1993
Revised Manuscript: February 17, 1994
Published: November 1, 1994

Klaus Leonhardt, Ulrich Droste, and Hans. J. Tiziani, "Microshape and rough-surface analysis by fringe projection," Appl. Opt. 33, 7477-7488 (1994)

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