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Applied Optics

Applied Optics


  • Vol. 33, Iss. 34 — Dec. 1, 1994
  • pp: 7955–7962

Profilometry by phase-shifted Talbot images

B. F. Oreb and R. G. Dorsch  »View Author Affiliations

Applied Optics, Vol. 33, Issue 34, pp. 7955-7962 (1994)

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We introduce a profilometry sensor that combines phase shifting with a Talbot self-image of a sinusoidal grating as the illumination part of the sensor. Contrast of the Talbot diffraction pattern produced with a sinusoidal grating in a diverging beam is theoretically discussed and verified experimentally. The mathematical relationship that is used to convert the phase measured with this sensor to the corresponding relief of an object is derived in the Appendix. A ceramic former used in the production of lenses was profiled with this sensor, and measurement results are presented.

© 1994 Optical Society of America

Original Manuscript: November 12, 1993
Revised Manuscript: April 25, 1994
Published: December 1, 1994

B. F. Oreb and R. G. Dorsch, "Profilometry by phase-shifted Talbot images," Appl. Opt. 33, 7955-7962 (1994)

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