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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 4 — Feb. 1, 1994
  • pp: 567–572

Three-dimensional analysis by a microlens-array confocal arrangement

Hans J. Tiziani and Hans-Martin Uhde  »View Author Affiliations


Applied Optics, Vol. 33, Issue 4, pp. 567-572 (1994)
http://dx.doi.org/10.1364/AO.33.000567


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Abstract

Scanning confocal microscopy is now well developed and applied. As an alternative to a laser spot to be scanned, parallel processing can be obtained when a two-dimensional structure is moved through the focal plane and a series of image sections is recorded. Surface topography is determined by analysis of the normalized intensity of the appropriate image points, i.e., a search of the intensity maximum leads to surface coordinates. With a high numerical aperture of the optical system, the half-width of I(z) is small, and the topography can be calculated with high accuracy. But with a high numerical aperture, only small object fields can be reproduced. As an alternative to the Nipkow disk for parallel processing, high-numerical-aperture microlenses are combined in an array. The reproducible object field is then limited by the size of the array and the number of lens and detector elements.

© 1994 Optical Society of America

History
Original Manuscript: May 20, 1993
Revised Manuscript: July 27, 1993
Published: February 1, 1994

Citation
Hans J. Tiziani and Hans-Martin Uhde, "Three-dimensional analysis by a microlens-array confocal arrangement," Appl. Opt. 33, 567-572 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-4-567

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