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Applied Optics

Applied Optics


  • Vol. 33, Iss. 7 — Mar. 1, 1994
  • pp: 1213–1217

Azimuthal alignments in ellipsometry: a high-precision method using a polarization modulator

J. Monin, H. Sahsah, A. Siblini, and O. Brevet-Philibert  »View Author Affiliations

Applied Optics, Vol. 33, Issue 7, pp. 1213-1217 (1994)

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An original (to the best of our knowledge) method to achieve azimuthal alignments of all polarizing components in ellipsometry is presented. It is an accurate nulling method, and it is easy to implement and can be used with any isotropic reflecting layer. It also allows one to check the eventual presence of surface anisotropy. The ferrofluid modulator used in this setup is briefly described. Measurements made for three reflecting surfaces (fused silica, silicon, and germanium) are presented.

© 1994 Optical Society of America

Original Manuscript: July 30, 1992
Revised Manuscript: December 28, 1992
Published: March 1, 1994

J. Monin, H. Sahsah, A. Siblini, and O. Brevet-Philibert, "Azimuthal alignments in ellipsometry: a high-precision method using a polarization modulator," Appl. Opt. 33, 1213-1217 (1994)

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