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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 7 — Mar. 1, 1994
  • pp: 1223–1229

Image scanning ellipsometry for measuring nonuniform film thickness profiles

An-Hong Liu, Peter C. Wayner, Jr., and Joel L. Plawsky  »View Author Affiliations


Applied Optics, Vol. 33, Issue 7, pp. 1223-1229 (1994)
http://dx.doi.org/10.1364/AO.33.001223


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Abstract

A novel technique to measure the two-dimensional (2-D) thickness profile of a nonuniform, thin film, from several nanometers to several micrometers, in a steady state as well as in a transient state has been developed and tested. Image scanning ellipsometry (ISE) is a full-field imaging technique that one can use to study every point on the surface simultaneously with high spatial resolution and thickness sensitivity, i.e., it can measure and map the 2-D film thickness profile. The primary purpose of this paper is to present the basic concept of ISE and a demonstration of its use.

© 1994 Optical Society of America

History
Original Manuscript: November 30, 1992
Revised Manuscript: June 4, 1993
Published: March 1, 1994

Citation
An-Hong Liu, Peter C. Wayner, and Joel L. Plawsky, "Image scanning ellipsometry for measuring nonuniform film thickness profiles," Appl. Opt. 33, 1223-1229 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-7-1223


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References

  1. B. V. Derjaguin, “A theory of capillary condensation in the pores of sorbents and of other capillary phenomena taking into account the disjoining action of polymolecular liquid films,” Acta Physicochim. URSS 12, 181–200 (1940).
  2. I. E. Dzyaloshinskii, E. M. Lifshitz, L. P. Pitaevskii, “The general theory of van der Waals forces,” Ad. Phys. 10, 165–209 (1961). [CrossRef]
  3. M. Potash, P. C. Wayner, “Evaporation from a two-dimensional extended meniscus,” Int. J. Heat Mass Transfer 15, 1851 (1972). [CrossRef]
  4. C. A. Miller, E. J. Ruckenstein, “The origin of flow during wetting of solids,” J. Colloid Interface Sci. 48, 368 (1974). [CrossRef]
  5. J. D. Chen, J. C. Slattery, “Effects of London–van der Waals forces on the thinning of dimpled liquid film as a small drop or bubble approaches a horizontal solid plate,” AIChE J. 28, 955 (1982). [CrossRef]
  6. P. G. deGennes, “Wetting: statics and dynamics,” Rev. Mod. Phys. 57, 827–863 (1985). [CrossRef]
  7. S. G. Bankoff, “Dynamics and stability of thin heated films,” ASME J. Heat Transfer 112, 538–546 (1990). [CrossRef]
  8. P. C. Wayner, “The effect of interfacial mass transport on flow in their liquid films,” Colloids Surfaces 52, 71–84 (1991). [CrossRef]
  9. B. V. Derjaguin, Z. M. Zorin, “Optical study of the adsorption and surface condensation of vapors in the vicinity of saturation on a smooth surface,” in Proceedings of the Second International Conference on Surface Activity, J. H. Schulman, ed. (Butterworth, London, 1957), Vol. 2, pp. 145–152.
  10. W. D. Bascom, R. L. Cottington, C. R. Singleterry, “Dynamic surface phenomena in the spontaneous spreading of oils on solids,” in Contact Angle, Wettability and Adhesion, R. E. Gould, ed., Adv. Chem. Ser. 43, 355–379 (1964). [CrossRef]
  11. B. J. Ingram, “Wetting of silica by n-alkanes,” J. Chem. Soc. Faraday Trans. 1 70, 868–876 (1974). [CrossRef]
  12. F. J. Renk, P. C. Wayner, “An evaporating ethanol meniscus,” J. Heat Transfer 101, 55–62 (1979). [CrossRef]
  13. R. Cook, C. Y. Tung, P. C. Wayner, “Use of scanning microphotometer to determine the evaporative heat transfer characteristics of the contact line region,” J. Heat Transfer 103, 325–330 (1981). [CrossRef]
  14. D. J. Beaglehole, “The wetting liquid–vapor interface of a binary liquid mixture,” J. Chem. Phys. 79, 1469–1473 (1983). [CrossRef]
  15. J. G. Troung, P. C. Wayner, “Effects of capillary and van der Waals dispersion forces on the equilibrium profile of a wetting liquid: theory and experiments,” J. Chem. Phys. 87, 4180–4188 (1987). [CrossRef]
  16. M. Sujanani, P. C. Wayner, “Microcomputer enhanced optical investigation of transport process with phase change in near equilibrium thin liquid films,” J. Colloid Interface Sci. 143, 472–488 (1991). [CrossRef]
  17. S. DasGupta, J. Schonberg, P. C. Wayner, “Investigation of an evaporating extended meniscus based on the augmented Young–Laplace equation,” J. Heat Transfer 115, 201–208 (1993). [CrossRef]
  18. R. B. Hurley, I. Kaufman, “Noncontacting microstrip monitor for liquid film thickness,” Rev. Sci. Instrum. 61, 2462–2465 (1990). [CrossRef]
  19. J. F. Klausner, L. Z. Zeng, D. M. Bernhard, “Development of a film thickness probe using capacitance for asymmetrical two-phase flow with heat addition,” Rev. Sci. Instrum. 62, 3152–3174 (1992).
  20. C. M. Mat, M. R. Lorenz, V. J. Novotny, “Atomic force microscopy of polymeric liquid films,” J. Chem. Phys. 90, 7550–7555 (1989). [CrossRef]
  21. M. Monde, “Measurement of liquid film thickness during passage of bubbles in a vertical rectangular channel,” J. Heat Transfer 112, 255–258 (1990). [CrossRef]
  22. M. Mitsuya, S. Imazeki, “Metal coating of organic thin films for thickness measurements by a stylus method,” Rev. Sci. Instrum. 61, 2466–2468 (1990). [CrossRef]
  23. W. H. Steel, Interferometry, 2nd ed. (Cambridge U. Press, Cambridge, U.K., 1983).
  24. G. E. Sommargren, “Optical heterodyne profilometry,” Appl. Opt. 20, 610–618 (1981). [CrossRef] [PubMed]
  25. M. J. Down, W. H. McGiven, H. J. Ferguson, “Optical system for measuring the profiles of super-smooth surfaces,” Precis. Eng. 7, 211–215 (1985). [CrossRef]
  26. C. P. Smith, D. C. Fritz, M. Tirrel, H. S. White, “Phase measurement interferometric microscopy of thin films: analysis of topography, refractive index, and thickness of solvent swollen polystyrene films,” Thin Solid Films 198, 369–386 (1991). [CrossRef]
  27. S. DasGupta, P. C. Wayner, “Use of image processing to study an evaporating extended R113 meniscus,” in Imaging in Transport Processes, S. Sideman, K. Hijikata, eds. (Begell, New York, 1993), Chap. 31, pp. 367–377.
  28. S. DasGupta, M. SuJanani, P. C. Wayner, “Microcomputer enhanced optical investigation of an evaporating liquid film controlled by a capillary feeder,” in Proceedings of the Second World Conference on Experimental Heat Transfer, Fluid Mechanics and Thermodynamics, J. F. Keffer, ed. (Elsevier, New York, 1991), pp. 361–368.
  29. S. DasGupta, I. Y. Kim, P. C. Wayner, “Interfacial phenomena, evaporation, and stress in a constrained capillary system,” in Proceedings of the National Heat Transfer Conference, (1992).
  30. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1989), paperback edition.
  31. M. K. Smit, J. W. Verhoof, “Accuracy analysis in multiple angle of incidence ellipsometry,” Thin Solid Films 189, 193–203 (1990). [CrossRef]
  32. C. L. Rhykerd, J. H. Clushman, P. F. Low, “Application of multiple-angle-of-incidence ellipsometry to the study of thin fluid films adsorbed on surfaces,” Langmuir 7, 2219–2229 (1991). [CrossRef]
  33. W. H. Weedon, S. W. McKnight, A. J. Devaney, “Selection of optimal angles for inversion of multiple-angle ellipsometry and reflectometry equations,” J. Opt. Soc. Am. A 8, 1881–1891 (1991). [CrossRef]
  34. J. R. Blanco, P. J. McMarr, “Roughness measurements of Si and Al by variable angle spectroscopic ellipsometry,” Appl. Opt. 30, 3210–3220 (1991). [CrossRef] [PubMed]
  35. H. W. Dinges, B. Kempf, H. Burkhard, “Determination of sputter damage on InP by MAI ellipsometry,” Surf. Interface Anal. 16, 77–81 (July1990). [CrossRef]
  36. F. Ferrien, J. H. Lecat, “Spectroscopic ellipsometry for the characterization of thin films,” J. Electrochem. Soc. 137, 2203–2208 (1990). [CrossRef]
  37. M. H. W. Verbruggen, J. M. M. de Nijs, “Analysis of spectroscopic ellipsometric measurements,” Comput. Phys. Commun. 69, 201–214 (1992). [CrossRef]
  38. G. Zalczer, V. Gurfein, “Spectroscopic ellipsometry near the Brewster angle on transparent substrates,” Rev. Sci. Instrum. 63, 2132–2134 (1992). [CrossRef]
  39. M. Fang, B. Drévillon, “In situ spectroellipsometry study of the nucleation and growth of microcrystalline silicon,” J. Appl. Phys. 70, 4894–4898 (1991). [CrossRef]
  40. G. E. Jellison, “Use of the biased estimator in the interpretation of spectroscopic ellipsometry data,” Appl. Opt. 30, 3354–3360 (1991). [CrossRef] [PubMed]
  41. M. Fried, T. Lohner, “Nondestructive determination of damage depth profiles in ion-implanted semiconductors by spectroscopic ellipsollietry using different optical models,” J. Appl. Phys. 71, 2835–2843 (1992). [CrossRef]
  42. N. V. Nguyen, B. S. Pudiner, I. An, R. W. Collins, “Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer,” J. Opt. Soc. Am. A 8, 919–931 (1991). [CrossRef]
  43. G. E. Jellison, “Two-channel spectroscopic polarization modulation ellipsometry: a new technique for the analysis of thin SiO2 films,” Thin Solid Films 206, 294–299 (1991). [CrossRef]
  44. J. T. Zettler, T. Dittrich, L. Schrottke, “Modulation ellipsometry—a new technique for the characterization of semiconductor materials and complex semiconductor structures,” Phys. Status Solidi A 119, K91–K95 (1990). [CrossRef]
  45. L. M. Blinov, D. B. Subachyus, S. V. Yablonsky, “The hydrodynamics of surface layers of nematic liquid crystal studies by modulation ellipsometry,” J. Phys. I (Paris) 1, 459–469 (1991).
  46. R. M. A. Azzam, “Transmission ellipsometry on transparent unbacked or embedded thin films with application to soap films in air,” Appl. Opt. 30, 2801–2806 (1991). [CrossRef] [PubMed]
  47. L. M. Folan, “Characterization of the accretion of material by microparticles using resonant ellipsometry,” Appl. Opt. 31, 2066–2071 (1992). [CrossRef] [PubMed]
  48. I. Ohlidal, M. Libezny, “Immersion ellipsometry of semiconductor surfaces,” Surf. Interface Anal. 16, 46–53 (1990). [CrossRef]
  49. A. Röseler, F. Marrbelli, G. Guizzetti, A. Borghesi, A. Piaggi, “Ellipsometry with Fourier transform spectrometer: an application to TaSi2 films,” Nuovo Cimento D 13, 169–176 (1991). [CrossRef]
  50. C. Lin, C. Chou, K. Chang, “Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques,” Appl. Opt. 29, 5159–5162 (1990). [CrossRef] [PubMed]
  51. D. Beaglehole, “Performance of a microscopic imaging ellipsometer,” Rev. Sci. Instrum. 59, 2557–2559 (1988). [CrossRef]
  52. D. Beaglehole, “Profiles of the precursor of spreading drops of siloxane oil on glass, fused silica, and mica,” J. Phys. Chem. 93, 893–899 (1989). [CrossRef]
  53. R. F. Cohn, J. W. Wagner, J. Kruger, “Dynamic imaging microellipsometry: theory, system, design, and feasibility demonstration,” Appl. Opt. 27, 4644–4671 (1988). [CrossRef]
  54. R. F. Cohn, J. W. Wagner, J. Kruger, “Dynamic imaging microellipsometry: proof of concept test results,” J. Electrochem. Soc. 135, 1033–1034 (1988). [CrossRef]
  55. R. F. Cohn, J. W. Wagner, “Current accuracy limits of dynamic imaging microellipsometry,” in Precision Instrument Design, T. C. Bristow, A. E. Hatheway, eds., Proc. Soc. Photo-Opt. Instrum. Eng. 1036, 125–134 (1988).
  56. R. F. Cohn, J. W. Wagner, “Nondestructive mapping of surface film parameter,” in Review of Progress in Quantitative Nondestructive Evaluation, D. O. Thompson, D. E. Chimenti, eds. (Plenum, New York, 1989), Vol. 8B, pp. 1219–1226.
  57. R. F. Cohn, J. W. Wagner, “Absolute and random error analysis of the dynamic imaging microellipsometry technique,” Appl. Opt. 28, 3187–3198 (1989). [CrossRef] [PubMed]
  58. R. F. Cohn, “Evaluation of alternative algorithms for dynamic imaging microellipsometry,” Appl. Opt. 29, 304–315 (1990). [CrossRef] [PubMed]
  59. C. C. Streinz, J. W. Wagner, J. Kruger, P. J. Moran, “Analysis of passive film growth by dynamic imaging microellipsometry,” J. Electrochem. Soc. 139, 711–715 (1992). [CrossRef]
  60. R. Reiter, H. Motschmann, H. Orendi, A. Nemetz, W. Knoll, “Ellipsometric microscopy: imaging monomolecular surfactant layers at the air–water interface,” Langmuir 8, 1784–1788 (1992). [CrossRef]
  61. D. I. Driscoll, R. L. Schmitt, W. H. Stevenson, “Thin flowing liquid film thickness measurement by laser induced fluorescence,” J. Fluids Eng. 114, 107–112 (1992). [CrossRef]
  62. J. B. Yang, Y. L. Oi, C. W. Chen, “Measurement of oil film thickness between W-N helical gear tooth profiles using laser transmission method,” Trans. ASME 112, 708–711 (1990). [CrossRef]
  63. W. A. Pliskin, E. E. Conrad, “Nondestructive determination of thickness and refractive index of transparent films,” IBM J. Res. Dev. 8, 43–51 (1964). [CrossRef]

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