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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 7 — Mar. 1, 1994
  • pp: 1242–1244

Waveguide polarizers processed by localized plasma etching

David L. Veasey, Donald R. Larson, and Iris Veigl  »View Author Affiliations


Applied Optics, Vol. 33, Issue 7, pp. 1242-1244 (1994)
http://dx.doi.org/10.1364/AO.33.001242


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Abstract

We develop a downstream localized plasma-etching process that permits in situ monitoring of light throughput in a semiconductor-clad channel waveguide as the semiconductor thickness is trimmed. Hydrogenated amorphous silicon films are deposited on ion-exchanged channel waveguides by plasma-enhanced chemical vapor deposition. We then employ the localized plasma-etching process to maximize accurately the extinction ratio between TE and TM polarizations propagating in the clad waveguide. We achieve polarization extinction ratios of greater than 30 dB for both TE-pass and TM-pass polarizers.

© 1994 Optical Society of America

History
Original Manuscript: December 29, 1992
Revised Manuscript: July 9, 1993
Published: March 1, 1994

Citation
David L. Veasey, Donald R. Larson, and Iris Veigl, "Waveguide polarizers processed by localized plasma etching," Appl. Opt. 33, 1242-1244 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-7-1242


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References

  1. R. F. Carson, T. E. Batchman, “Multimode phenomena in semiconductor-clad dielectric optical waveguide structures,” Appl. Opt. 29, 2769–2780 (1990). [CrossRef] [PubMed]
  2. D. L. Veasey, R. K. Hickernell, D. Larson, T. E. Batchman, “Waveguide polarizers with hydrogenated amorphous silicon claddings,” Opt. Lett. 16, 717–719 (1991). [CrossRef] [PubMed]
  3. R. J. Deri, E. C. M. Pennings, R. J. Hawkins, “Quenching of resonantly enhanced absorption by multimode interference in vertically coupled waveguide photodetectors,” Opt. Lett. 17, 667–669 (1992). [CrossRef] [PubMed]
  4. K. Kasper, P. P. Deimel, “Enhanced polarization-dependent coupling between an optical waveguide and a laterally coupled photodetector,” J. Appl. Phys. 70, 13–16 (1991). [CrossRef]
  5. D. L. Veasey, D. R. Larson, R. J. Phelan, T. E. Batchman, “Semiconductor claddings on glass waveguides for polarizers and detectors,” in Annual Meeting, Vol. 15 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), p. 1.
  6. D. R. Larson, D. L. Veasey, “Localized plasma etching for device optimization,” J. Vac. Sci. Technol. B 10, 27–29 (1992). [CrossRef]
  7. R. B. Smith, G. L. Mitchell, “Calculation of complex propagating modes in arbitrary plane-layered, complex dielectric structures,” Rep. PB-277-152 (National Technical Information Service, Springfield, Va., 1972).

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