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Applied Optics

Applied Optics


  • Vol. 34, Iss. 14 — May. 10, 1995
  • pp: 2556–2559

V-groove gratings on silicon for infrared beam splitting

N. Rajkumar and J. N. McMullin  »View Author Affiliations

Applied Optics, Vol. 34, Issue 14, pp. 2556-2559 (1995)

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Infrared beam-splitting transmission gratings that utilize anisotropically etched v-grooves on silicon wafers are proposed. With scalar diffraction theory to find the amplitudes of the different diffraction orders, a numerical search is used to find optimum designs for 1:3, 1:5, and 1:7 splitters with efficiencies greater than 70% with a standard deviation in intensity of no more than 7%.

© 1995 Optical Society of America

Original Manuscript: July 29, 1994
Revised Manuscript: October 24, 1994
Published: May 10, 1995

N. Rajkumar and J. N. McMullin, "V-groove gratings on silicon for infrared beam splitting," Appl. Opt. 34, 2556-2559 (1995)

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