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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 34, Iss. 14 — May. 10, 1995
  • pp: 2556–2559

V-groove gratings on silicon for infrared beam splitting

N. Rajkumar and J. N. McMullin  »View Author Affiliations


Applied Optics, Vol. 34, Issue 14, pp. 2556-2559 (1995)
http://dx.doi.org/10.1364/AO.34.002556


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Abstract

Infrared beam-splitting transmission gratings that utilize anisotropically etched v-grooves on silicon wafers are proposed. With scalar diffraction theory to find the amplitudes of the different diffraction orders, a numerical search is used to find optimum designs for 1:3, 1:5, and 1:7 splitters with efficiencies greater than 70% with a standard deviation in intensity of no more than 7%.

© 1995 Optical Society of America

History
Original Manuscript: July 29, 1994
Revised Manuscript: October 24, 1994
Published: May 10, 1995

Citation
N. Rajkumar and J. N. McMullin, "V-groove gratings on silicon for infrared beam splitting," Appl. Opt. 34, 2556-2559 (1995)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-34-14-2556


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References

  1. H. Dammann, E. Klotz, “Coherent-optical generation and inspection of two-dimensional periodic structures,” Opt. Acta 24, 505–515 (1977). [CrossRef]
  2. J. Jahns, M. M. Downs, N. Streibl, S. J. Walker, “Dammann gratings for laser beam shaping,” Opt. Eng. 28, 1267–1275 (1989).
  3. S. M. Shank, M. Skvarla, F. T. Chen, H. G. Craighead, P. Cook, R. Bussjager, F. Haas, D. A. Honey, “Fabrication of multi-level phase gratings using focused ion beam milling and electron beam lithography,” in Diffractive Optics, Vol. 11 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper DWD3, pp. 302–305.
  4. K. E. Bean, “Anisotropic etching of silicon,” IEEE Trans. Electron Devices ED-25, 1185–1193 (1978). [CrossRef]
  5. U. U. Graf, D. T. Joffe, E. J. Kim, J. H. Lacy, H. Ling, J. T. Moore, G. Rebeiz, “Fabrication and evaluation of an etched infrared diffraction grating,” Appl. Opt. 33, 96–102 (1994). [CrossRef] [PubMed]
  6. R. Narendra, J. N. McMullin, “Single-mode, phosphorous-doped silica waveguides in silicon V-grooves,” IEEE Photon. Technol. Lett. 5, 43–46 (1993). [CrossRef]
  7. W. Tsang, S. Wang, “Thin-film beam splitter and reflector for optical guided waves,” Appl. Phys. Lett. 27, 588–590 (1975). [CrossRef]
  8. S. Sriram, G. B. Brandt, E. P. Supertzi, “Heterodyne receiver on silicon: an exercise in integration,” in Integrated Optics II, D. G. Hall, ed., Proc. Soc. Photo-Opt. Instrum. Eng.321, 15–22 (1982).
  9. S. Sriram, E. P. Supertzi, “Novel V-groove structures on silicon,” Appl. Opt. 24, 1784–1787 (1985). [CrossRef] [PubMed]
  10. J. A. Cox, F. P. Shvartsman, “Image quality assessment of diffractive elements replicated in SURPHEX™,” in Diffractive Optics, Vol. 11 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper DThB4, pp. 346–349.

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