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Applied Optics

Applied Optics


  • Vol. 34, Iss. 16 — Jun. 1, 1995
  • pp: 2968–2972

Flexible mirror micromachined in silicon

Gleb Vdovin and P. M. Sarro  »View Author Affiliations

Applied Optics, Vol. 34, Issue 16, pp. 2968-2972 (1995)

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An electrostatically controlled flexible mirror has been fabricated on a silicon chip by means of bulk micromachining. The mirror has a 10.5 mm × 10.5 mm square aperture and consists of a 0.5-μm-thick tensile-stressed silicon-nitride diaphragm coated with a 0.2-μm-thick reflective aluminum layer. The reflecting surface is initially plane with a mean-square deviation of ∼λ/8 for λ = 633 nm. The shape of the reflecting surface is controlled electrostatically by an array of integrated actuators. Good initial optical quality and the possibility of electrostatic control of the reflecting surface make the on-chip mirror useful for various electro-optical applications.

© 1995 Optical Society of America

Original Manuscript: April 5, 1994
Revised Manuscript: September 26, 1994
Published: June 1, 1995

Gleb Vdovin and P. M. Sarro, "Flexible mirror micromachined in silicon," Appl. Opt. 34, 2968-2972 (1995)

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