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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 34, Iss. 19 — Jul. 1, 1995
  • pp: 3727–3730

Molybdenum/beryllium multilayer mirrors for normal incidence in the extreme ultraviolet

K. M. Skulina, C. S. Alford, R. M. Bionta, D. M. Makowiecki, E. M. Gullikson, R. Soufli, J. B. Kortright, and J. H. Underwood  »View Author Affiliations


Applied Optics, Vol. 34, Issue 19, pp. 3727-3730 (1995)
http://dx.doi.org/10.1364/AO.34.003727


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Abstract

We report on a series of normal-incidence reflectance measurements at wavelengths just longer than the beryllium K-edge (11.1 nm) from molybdenum/beryllium multilayer mirrors. The highest peak reflectance was 68.7 ± 0.2% at λ = 11.3 nm obtained from a mirror with 70 bilayers ending in beryllium. To our knowledge, this is the highest normal-incidence reflectance that has been demonstrated in the 1–80-nm spectral range.

© 1995 Optical Society of America

History
Original Manuscript: August 18, 1994
Published: July 1, 1995

Citation
K. M. Skulina, C. S. Alford, R. M. Bionta, D. M. Makowiecki, E. M. Gullikson, R. Soufli, J. B. Kortright, and J. H. Underwood, "Molybdenum/beryllium multilayer mirrors for normal incidence in the extreme ultraviolet," Appl. Opt. 34, 3727-3730 (1995)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-34-19-3727

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