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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 34, Iss. 31 — Nov. 1, 1995
  • pp: 7355–7360

Optical-constant calculation over an extended spectral region: application to titanium dioxide film

Shu-Chung Chiao, Bertrand G. Bovard, and H. A. Macleod  »View Author Affiliations


Applied Optics, Vol. 34, Issue 31, pp. 7355-7360 (1995)
http://dx.doi.org/10.1364/AO.34.007355


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Abstract

An iterative algorithm has been developed that takes starting values derived by an envelope method but then minimizes the influence of the envelopes and emphasizes the actual measured data. This combination avoids the difficulties inherent in the accurate drawing of the envelopes and makes it possible to extract the thickness and the optical constants of semiconducting and dielectric films over a wide spectral region, including regions of high absorption.

© 1995 Optical Society of America

History
Original Manuscript: January 12, 1995
Revised Manuscript: June 9, 1995
Published: November 1, 1995

Citation
Shu-Chung Chiao, Bertrand G. Bovard, and H. A. Macleod, "Optical-constant calculation over an extended spectral region: application to titanium dioxide film," Appl. Opt. 34, 7355-7360 (1995)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-34-31-7355


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References

  1. J. C. Manifacier, J. Gasiot, J. P. Fillard, “A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002–1004 (1976). [CrossRef]
  2. R. Swanepoel, “Determination of the thickness and optical constants of amorphous silicon,” J. Phys. E. 16, 1214–1222 (1983). [CrossRef]
  3. D. Minkov, R. Swanepoel, “Computerization of the optical characterization of a thin dielectric film,” Opt. Eng. 32, 3333–3337 (1993). [CrossRef]
  4. M. McClain, A. Feldman, D. Kahaner, X. Ying, “An algorithm and computer program for the calculation of envelope curves,” Comput. Phys. 5, 45–48 (1991). [CrossRef]
  5. I. H. Malitson, “Interspecimen comparison of the refractive index of fused silica,” J. Opt. Soc. Am. 55, 1205–1209 (1965). [CrossRef]
  6. J. M. Bennett, E. Pelletier, G. Albrand, J. P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, A. Saxer, “Comparison of the properties of titanium dioxide films prepared by various techniques,” Appl. Opt. 28, 3303–3317 (1989). [CrossRef] [PubMed]
  7. F. K. Urban, “Ellipsometry algorithm for absorbing films,” Appl. Opt. 32, 2339–2344 (1993). [CrossRef]

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