An intensity-modulated fiber-optic accelerometer based on backreflection effects has been manufactured and tested. It uses a multimode fiber placed at a spherical mirror center, and the beam intensity is modulated by a micromachined silicon cantilever. This device has applications as an accelerometer and vibrometer for rotating machines. It exhibits an amplitude linearity of ±1.2% in the range of 0.1–22 m s−2, a frequency linearity of ±1% in the range of 0–100 Hz, and a temperature sensitivity of less than 0.03%/°C. The sensor is devoted to a wavelength-division multiplexing network.
© 1995 Optical Society of America
Original Manuscript: July 25, 1994
Revised Manuscript: May 22, 1995
Published: December 1, 1995
Abdelrafik Malki, Pierre Lecoy, Jeanine Marty, Christine Renouf, and Pierre Ferdinand, "Optical fiber accelerometer based on a silicon micromachined cantilever," Appl. Opt. 34, 8014-8018 (1995)