Abstract

A statistical model that describes the analog measurement of a fluctuating light intensity that arises from a non-Gaussian scattering process is developed. The higher-order statistical moments are derived for a p-i-n diode receiver model and gamma-distributed intensity fluctuations. Criteria for the accurate measurement of the scattering fluctuations are found, and these are used to analyze data derived from an on-line scatterometer system. Implications for future on-line measurement technology are discussed.

© 1995 Optical Society of America

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