OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 1 — Jan. 1, 1996
  • pp: 131–148

Linnik microscope imaging of integrated circuit structures

D. M. Gale, M. I. Pether, and J. C. Dainty  »View Author Affiliations


Applied Optics, Vol. 35, Issue 1, pp. 131-148 (1996)
http://dx.doi.org/10.1364/AO.35.000131


View Full Text Article

Enhanced HTML    Acrobat PDF (516 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Experimental one-dimensional intensity and phase images of thick (>200 nm) oxide lines on silicon are presented together with profiles predicted from the waveguide model. Experimental results were obtained with a purpose-built Linnik interference microscope that makes use of phase-shifting interferometry for interferogram analysis. Profiles have been obtained for both TE and TM polarizations for a wide range of focal positions and in both bright-field [type 1(a)] scanning and confocal modes of microscope operation. The results show extremely good agreement despite several simplifying assumptions incorporated into the theoretical model to reduce computing times.

© 1996 Optical Society of America

History
Original Manuscript: May 4, 1995
Revised Manuscript: August 29, 1995
Published: January 1, 1996

Citation
D. M. Gale, M. I. Pether, and J. C. Dainty, "Linnik microscope imaging of integrated circuit structures," Appl. Opt. 35, 131-148 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-1-131

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited