OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 1 — Jan. 1, 1996
  • pp: 90–96

Mixed films of TiO2–SiO2 deposited by double electron-beam coevaporation

Jyh-Shin Chen, Shiuh Chao, Jiann-Shiun Kao, Huan Niu, and Chih-Hsin Chen  »View Author Affiliations


Applied Optics, Vol. 35, Issue 1, pp. 90-96 (1996)
http://dx.doi.org/10.1364/AO.35.000090


View Full Text Article

Enhanced HTML    Acrobat PDF (272 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We used double electron-beam coevaporation to fabricate TiO2–SiO2 mixed films. The deposition process included oxygen partial pressure, substrate temperature, and deposition rate, all of which were real-time computer controlled. The optical properties of the mixed films varied from pure SiO2 to pure TiO2 as the composition of the films varied accordingly. X-ray diffraction showed that the mixed films all have amorphous structure with a SiO2 content of as low as 11%. Atomic force microscopy showed that the mixed film has a smoother surface than pure TiO2 film because of its amorphous structure. Linear and Bruggeman's effective medium approximation models fit the experimental data better than other models.

© 1996 Optical Society of America

History
Original Manuscript: February 2, 1995
Revised Manuscript: July 13, 1995
Published: January 1, 1996

Citation
Jyh-Shin Chen, Shiuh Chao, Jiann-Shiun Kao, Huan Niu, and Chih-Hsin Chen, "Mixed films of TiO2–SiO2 deposited by double electron-beam coevaporation," Appl. Opt. 35, 90-96 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-1-90


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. P. P. Herrmann, D. Wildmann, “Fabrication of planar dielectric waveguides with high optical damage threshold,” IEEE J. Quantum Electron. QE-19, 1735–1738 (1983). [CrossRef]
  2. M. Kobayashi, H. Terui, “Refractive index and attenuation characteristics of SiO2–Ta2O5, optical waveguide film,” Appl. Opt. 22, 3121–3127 (1983). [CrossRef] [PubMed]
  3. C. S. Bartholomew, M. D. Morrow, H. T. Betz, J. L. Grieser, R. A. Spence, N. P. Muraka, “Rugate filters by laser flash evaporation of SiOxNy on room-temperature polycarbonate,” J. Vac. Sci. Technol A. 6, 1703–1707 (1988). [CrossRef]
  4. G. Boivin, D. St-Germain, “Synthesis of gradient-index profiles corresponding to spectral reflectance derived by inverse Fourier transform,” Appl. Opt. 26, 4209–4213 (1987). [CrossRef] [PubMed]
  5. W. J. Gunning, R. L. Hall, F. J. Woodberry, W. H. Southwell, N. S. Gluck, “Codeposition of continuous composition rugate filters,” Appl. Opt. 28, 2945–2948 (1989). [CrossRef] [PubMed]
  6. H. Sankur, W. H. Southwell, “Broadband gradient-index antireflection coating for ZnSe,” Appl. Opt. 23, 2770–2773 (1984). [CrossRef] [PubMed]
  7. M. F. Ouellette, R. V. Lang, K. L. Yan, R. W. Bertram, R. S. Owles, D. Vincent, “Experimental studies of inhomogeneous coatings for optical applications,” J. Vac. Sci. Technol. A 9, 1188–1192 (1991). [CrossRef]
  8. A. Feldman, E. N. Farabaugh, W. K. Haller, D. M. Sanders, R. A. Stempniak, “Modifying structure and properties of optical films by coevaporation,” J. Vac. Sci. Technol. A 4, 2969–2974 (1986). [CrossRef]
  9. H-W. Zhang, S-X Liu, “Optical compound film deposited by a double e-gun,” Thin Solid Films 209, 148–149 (1992). [CrossRef]
  10. H. Sankur, W. Gunning, “Sorbed water and intrinsic stress in composite TiO2–SiO2 films,” J. Appl. Phys. 66, 807–812 (1989). [CrossRef]
  11. H. Demiryont, “Optical properties of SiO2–TiO2 composite films,” Appl. Opt. 24, 2647–2650 (1985). [CrossRef] [PubMed]
  12. S. Chao, C-K. Chang, J-S. Chen, “TiO2–SiO2 mixed films prepared by the fast alternating sputter method,” Appl. Opt. 30, 3233–3237 (1991). [CrossRef] [PubMed]
  13. K. H. Guenther, “Nonoptical characterization of optical coatings,” Appl. Opt. 20, 3487–3502 (1981). [CrossRef] [PubMed]
  14. L. R. Doolittle, M. Thompson, Computer Code RUMP (Computer Graphics Service, Ithaca, N.Y., 1988).
  15. S. Chao, Y-F. Lin, J-F. Lin, C-C. Lee, “Scattering loss of an optimum pair high reflectance dielectric mirror,” Appl. Opt. 29, 1960–1963 (1990). [CrossRef] [PubMed]
  16. C. K. Carniglia, J. H. Apfel, “Maximum reflectance of multilayer dielectric mirrors in the presence of slight absorption,” J. Opt. Soc. Am. 70, 523–534 (1980). [CrossRef]
  17. R. Swanepoel, “Determination of the thickness and optical constants of amorphous silicon,” J. Phys. E 16, 1214–1222 (1983). [CrossRef]
  18. A. Feldman, “Modeling refractive index in mixed component systems,” in Modeling of Optical Thin Films, M. R. Jackson, ed., Proc. Soc. Photo-Opt. Instrum. Eng.821, 129–132 (1987).
  19. R. Jacobsson, “Inhomogeneous and coevaporated homogeneous films for optical applications,” in Physics of Thin Films, G. Hass, M. H. Francombe, R. W. Hoffman, eds. (Academic, New York, 1978), Vol. 8, pp. 51–98.
  20. D. E. Aspnes, “Optical properties of thin films,” Thin Solid Films 89, 249–262 (1982). [CrossRef]
  21. D. E. Aspnes, “Local-field effects and effective-medium theory: a microscopic perspective,” Am. J. Phys. 50, 704–709 (1982). [CrossRef]
  22. Crystal Data Determination Tables, Vol. 2,3rd ed. (U.S. Dept. of Commerce, National Bureau of Standards, Washington D.C., 1973), pp. T-163.
  23. M. Bass, ed., Handbook of Optics, Vol. 2, 2nd ed. (McGraw-HillNew York, 1995), Chap. 33, Table 9.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited