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Applied Optics

Applied Optics


  • Vol. 35, Iss. 13 — May. 1, 1996
  • pp: 2172–2178

Numerical simulations of vibration in phase-shifting interferometry

Peter J. de Groot and Leslie L. Deck  »View Author Affiliations

Applied Optics, Vol. 35, Issue 13, pp. 2172-2178 (1996)

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Computer simulations predict the expected rms measurement error in a phase-shifting interferometer in the presence of mechanical vibrations. The simulations involve a numerical resolution of a nonlinear mathematical model and are performed over a range of vibrational frequencies and amplitudes for three different phase-shift algorithms. Experimental research with an interference microscope and comparison with analytical solutions verify the numerical model.

© 1996 Optical Society of America

Original Manuscript: June 12, 1995
Revised Manuscript: November 20, 1995
Published: May 1, 1996

Peter J. de Groot and Leslie L. Deck, "Numerical simulations of vibration in phase-shifting interferometry," Appl. Opt. 35, 2172-2178 (1996)

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