Computer simulations predict the expected rms measurement error in a phase-shifting interferometer in the presence of mechanical vibrations. The simulations involve a numerical resolution of a nonlinear mathematical model and are performed over a range of vibrational frequencies and amplitudes for three different phase-shift algorithms. Experimental research with an interference microscope and comparison with analytical solutions verify the numerical model.
© 1996 Optical Society of America
Original Manuscript: June 12, 1995
Revised Manuscript: November 20, 1995
Published: May 1, 1996
Peter J. de Groot and Leslie L. Deck, "Numerical simulations of vibration in phase-shifting interferometry," Appl. Opt. 35, 2172-2178 (1996)