Abstract

A high-accuracy, two-color interferometer for characterizing a processed surface is described. It is composed of two frequency doublers. It is not affected by air turbulence and mechanical vibration because it is a complete common-path interferometer, and the effects from different reflectivities of various materials are canceled by a four-phase-step technique that shifts the phase of the interference fringe in steps of π/2. The processed surface is measured with subnanometer resolution.

© 1996 Optical Society of America

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