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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 22 — Aug. 1, 1996
  • pp: 4413–4419

Fourier-transform design and electron cyclotron resonance plasma-enhanced deposition of lossy graded-index optical coatings

Pavel V. Bulkin, Pieter L. Swart, and Beatrys M. Lacquet  »View Author Affiliations


Applied Optics, Vol. 35, Issue 22, pp. 4413-4419 (1996)
http://dx.doi.org/10.1364/AO.35.004413


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Abstract

A Fourier-transform synthesis technique is applied to the design of inhomogeneous refractive-index optical thin films with dispersion of refractive index and absorption taken into account. Using measured properties of SiO x N y , we have designed a broadband reflector and two three-line filters with high reflectance. One of the three-line filters was manufactured by electron cyclotron resonance plasma-enhanced chemical vapor deposition from a mixture of SiH4, N2, O2, and Ar. Good agreement between design and measured performance proves the feasibility of applying the Fourier-transform technique to the design of reflection filters even in the case of highly dispersive, absorbing material, if its optical properties are well characterized.

© 1996 Optical Society of America

History
Original Manuscript: September 25, 1995
Revised Manuscript: January 16, 1996
Published: August 1, 1996

Citation
Pavel V. Bulkin, Pieter L. Swart, and Beatrys M. Lacquet, "Fourier-transform design and electron cyclotron resonance plasma-enhanced deposition of lossy graded-index optical coatings," Appl. Opt. 35, 4413-4419 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-22-4413

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