A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry of this process and the optical quality of the lenses are discussed.
© 1996 Optical Society of America
Original Manuscript: November 15, 1995
Revised Manuscript: February 12, 1996
Published: August 1, 1996
Sylvain Lazare, John Lopez, Jean-Marie Turlet, Maria Kufner, Stefan Kufner, and Pierre Chavel, "Optical Activities in Industry Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion," Appl. Opt. 35, 4471-4475 (1996)