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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 22 — Aug. 1, 1996
  • pp: 4471–4475

Optical Activities in Industry Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion

Sylvain Lazare, John Lopez, Jean-Marie Turlet, Maria Kufner, Stefan Kufner, and Pierre Chavel  »View Author Affiliations


Applied Optics, Vol. 35, Issue 22, pp. 4471-4475 (1996)
http://dx.doi.org/10.1364/AO.35.004471


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Abstract

A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry of this process and the optical quality of the lenses are discussed.

© 1996 Optical Society of America

History
Original Manuscript: November 15, 1995
Revised Manuscript: February 12, 1996
Published: August 1, 1996

Citation
Sylvain Lazare, John Lopez, Jean-Marie Turlet, Maria Kufner, Stefan Kufner, and Pierre Chavel, "Optical Activities in Industry Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion," Appl. Opt. 35, 4471-4475 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-22-4471


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References

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  7. J. O. Choi, J. A. Moore, J. C. Corelli, J. P. Silverman, H. Bakhru, “Degradation of poly(methylmethacrylate) by deep ultraviolet, x-ray, electron beam and proton beam irradiating,” J. Vac. Sci. Technol. B 6(6), 2286–2289 (1988). [CrossRef]
  8. A. Fritz, “Herstellung von mikrolinsen aus PMMA durch belichtung mit synchrotronstrahlung und styrol-diffusion und ihre charakterisierung,” Master’s thesis (Universität Karlsruhe, Karlsruhe, Germany, 1994).
  9. M. Kufner, S. Kufner, S. Lazare, P. Pichon, P. Chavel, “Microlenses in PMMA fabricated by particle or electromagnetic irradiation and monomer diffusion,” in Microlens Arrays, Vol. 3 (Institute of Physics, London, 1995), pp. 5–8.

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