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Applied Optics

Applied Optics


  • Vol. 35, Iss. 24 — Aug. 20, 1996
  • pp: 4782–4786

Laser interferometric diffractometry for measurements of diffraction grating spacing

Vladimir I. Korotkov, Sergei A. Pulkin, Artyom L. Vitushkin, and Leonid F. Vitushkin  »View Author Affiliations

Applied Optics, Vol. 35, Issue 24, pp. 4782-4786 (1996)

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Two methods and an experimental setup for the measurement of spacing of diffraction gratings have been developed. These methods depend on interferometric measurements at different wavelengths of the angles of diffraction beams from the grating to be measured. A lower limit for the measured spacing is the half-wavelength of laser radiation. The results of spacing measurements of approximately 0.28, 0.39, and 0.50 μm are presented.

© 1996 Optical Society of America

Original Manuscript: December 5, 1995
Revised Manuscript: February 26, 1996
Published: August 20, 1996

Vladimir I. Korotkov, Sergei A. Pulkin, Artyom L. Vitushkin, and Leonid F. Vitushkin, "Laser interferometric diffractometry for measurements of diffraction grating spacing," Appl. Opt. 35, 4782-4786 (1996)

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  1. J. R. McNeil, “Linewidth measurement of gratings on photomasks: a simple technique,” Appl. Opt. 31, 1377–1384 (1992). [CrossRef] [PubMed]
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