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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 25 — Sep. 1, 1996
  • pp: 5048–5051

Determination of grain size in indium tin oxide films from transmission measurements

J. P. Lehan  »View Author Affiliations


Applied Optics, Vol. 35, Issue 25, pp. 5048-5051 (1996)
http://dx.doi.org/10.1364/AO.35.005048


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Abstract

The grain size of In2O3:Sn thin films on transparent substrates is determined. The method employs the ratio of specular to total transmission to deduce the film grain size. Interpretation of these data is accomplished with the aid of Bhattacharyya et al.’s model [Vacuum 43, 1201 (1992)] of a polycrystalline thin film. This is combined with knowledge of scattering cross-correlation laws. Finally, a simple correction is derived for the scattering contribution from the substrate. Although approximate, the results for the grain size obtained by the reported optical method and by scanning electron microscopy were in agreement within experimental uncertainties.

© 1996 Optical Society of America

History
Original Manuscript: September 20, 1995
Revised Manuscript: February 20, 1996
Published: September 1, 1996

Citation
J. P. Lehan, "Determination of grain size in indium tin oxide films from transmission measurements," Appl. Opt. 35, 5048-5051 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-25-5048


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References

  1. D. Bhattacharyya, S. Chaudhuri, A. K. Pal, S. K. Bhattacharyya, “Some aspects of surface roughness in polycrystalline thin films: optical constants and grain distributions,” Vacuum 43, 1201–1205 (1992). [CrossRef]
  2. J. Szczyrbowski, A. Czapla, “Optical absorption in D.C. sputtered InAs Films,” Thin Solid Films 46, 127–137 (1977). [CrossRef]
  3. H. E. Bennett, J. O. Porteus, “Relation between surface roughness and specular reflectance at normal incidence,” J. Opt. Soc. Am. 51, 123–129 (1961). [CrossRef]
  4. C. Amra, P. Roche, E. Pelletier, “Interface roughness cross-correlation laws deduced from scattering diagram measurements on optical multilayers: effect of material grain size,” J. Opt. Soc. Am. B 4, 1087–1093 (1987). [CrossRef]
  5. P. Bousquet, F. Flory, P. Roche, “Scattering from multilayer thin films: theory and experiment,” J. Opt. Soc. Am. 71, 1115–1123 (1981). [CrossRef]
  6. J. R. Taylor, An Introduction to Error Analysis (University Science, Mill Valley, Calif., 1984), pp. 70–74.
  7. C. K. Carniglia, “A simple dispersion equation for dielectric and semiconductor materials,” in Society of Vacuum Coaters Thirty-Eighth Annual Technical Conference Proceedings (Society of Vacuum Coaters, Albuquerque, N.M., 1995), pp. 176–181.
  8. I. Hamberg, “Indium-tin-oxide thin films: basic optical properties and applications of energy efficient windows,” Ph.D. dissertation (Chalmers University of Technology, Chalmers, Sweden, 1984).
  9. D. Bhattacharyya, S. Chaudhuri, A. K. Pal, “Alternative route for studying the grain boundary scattering in semiconductor films of high resistivity,” Vacuum 44, 797–801 (1993). [CrossRef]
  10. D. Bhattacharyya, S. Chaudhuri, A. K. Pal, “Bandgap and optical transitions in thin films from reflectance measurements,” Vacuum 43, 313–316 (1992). [CrossRef]
  11. J. A. Thornton, “Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered films,” J. Vac. Sci. Technol. 11, 666–670 (1974). [CrossRef]

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