Tantalum pentoxide (Ta2O5) layers made by ion plating are implanted with a high fluence of keV Ti, Li, and Er ions. The resulting refractive-index profiles are given from the analysis of guided-wave propagation conditions. A comparison with spectrophotometric measurements is presented. All the implanted layers present low losses (extinction coefficient of some 10−6) after thermal annealing in air. Ti-implanted layers exhibit an increase in refractive index, whereas Li- and Er-implanted layers present a slight decrease in refractive index. Er-implanted layers present photoluminescent properties.
© 1996 Optical Society of America
F. Flory, D. Berthier, H. Rigneault, and L. Roux, "Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta2O5," Appl. Opt. 35, 5085-5090 (1996)