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Applied Optics

Applied Optics


  • Vol. 35, Iss. 25 — Sep. 1, 1996
  • pp: 5085–5090

Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta2O5

F. Flory, D. Berthier, H. Rigneault, and L. Roux  »View Author Affiliations

Applied Optics, Vol. 35, Issue 25, pp. 5085-5090 (1996)

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Tantalum pentoxide (Ta2O5) layers made by ion plating are implanted with a high fluence of keV Ti, Li, and Er ions. The resulting refractive-index profiles are given from the analysis of guided-wave propagation conditions. A comparison with spectrophotometric measurements is presented. All the implanted layers present low losses (extinction coefficient of some 10−6) after thermal annealing in air. Ti-implanted layers exhibit an increase in refractive index, whereas Li- and Er-implanted layers present a slight decrease in refractive index. Er-implanted layers present photoluminescent properties.

© 1996 Optical Society of America

Original Manuscript: November 22, 1995
Revised Manuscript: April 3, 1996
Published: September 1, 1996

F. Flory, D. Berthier, H. Rigneault, and L. Roux, "Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta2O5," Appl. Opt. 35, 5085-5090 (1996)

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