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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 25 — Sep. 1, 1996
  • pp: 5085–5090

Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta2O5

F. Flory, D. Berthier, H. Rigneault, and L. Roux  »View Author Affiliations


Applied Optics, Vol. 35, Issue 25, pp. 5085-5090 (1996)
http://dx.doi.org/10.1364/AO.35.005085


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Abstract

Tantalum pentoxide (Ta2O5) layers made by ion plating are implanted with a high fluence of keV Ti, Li, and Er ions. The resulting refractive-index profiles are given from the analysis of guided-wave propagation conditions. A comparison with spectrophotometric measurements is presented. All the implanted layers present low losses (extinction coefficient of some 10−6) after thermal annealing in air. Ti-implanted layers exhibit an increase in refractive index, whereas Li- and Er-implanted layers present a slight decrease in refractive index. Er-implanted layers present photoluminescent properties.

© 1996 Optical Society of America

History
Original Manuscript: November 22, 1995
Revised Manuscript: April 3, 1996
Published: September 1, 1996

Citation
F. Flory, D. Berthier, H. Rigneault, and L. Roux, "Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta2O5," Appl. Opt. 35, 5085-5090 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-25-5085


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References

  1. R. Richier, C. Grèzes-Besset, E. Pelletier, “End-coatings on multi-demultiplexers in optical communications,” in Thin Films for Optical Systems, K. H. Guenther, ed., Proc. SPIE1782, 405–413 (1992).
  2. E. Lallier, J. P. Pocholle, M. Papuchon, M. P. De Micheli, M. J. Li, Q. He, D. B. Ostrowsky, C. Grèzes-Besset, E. Pelletier, “LiNbO3 with rare earths: lasers and amplifiers,” in Micro-Optics II, A. V. Scheggi, ed., Proc. SPIE1506, 71–79 (1991).
  3. P. D. Townsend, P. J. Chandler, L. Zhang, Optical Effects of Ion Implantation, Cambridge Studies in Modern Optics, P. L. Knight, A. Miller, eds. (Cambridge U. Press, Cambridge, 1994), Chap. 6, p. 196. [CrossRef]
  4. P. N. Favennec, L’implantation ionique pour la microélectronique et l’optique, in Collection Technique et Scientifique des Télécommunications (Masson, Paris, 1993).
  5. H. K. Pulker, W. Haag, E. Moll, Balzers AG, “Reactive low voltage ion plating,” Swiss patent00928/85-05 (applied 3January1985); H. K. Pulker, W. Haag, E. Moll, U.S. patent4,619,748 (1986).
  6. J. P. Borgogno, F. Flory, P. Roche, B. Schmitt, G. Albrand, E. Pelletier, H. A. Macleod, “Refractive index and inhomogeneity of thin films,” Appl. Opt. 23, 3567–3570 (1984). [CrossRef] [PubMed]
  7. P. J. Chandler, F. L. Lama, “A new approach to the determination of planar waveguide profiles by means of non-stationary mode index calculation,” Opt. Acta 33, 127–143 (1986). [CrossRef]
  8. J. P. Nougier, Méthodes de Calcul Numérique, (Masson, Paris, 1987), pp. 194–195.
  9. M. Commandré, G. Albrand, E. Pelletier, “Photothermal deflection spectroscopy for the study of thin films and optical coatings: measurement of absorption losses and detection of photo-induced changes,” in Optical Thin Films and Applications, R. Herrmann, ed., Proc. SPIE1270, 82–93 (1990).
  10. F. Flory, “Guided wave techniques for the characterization of optical coatings” in Thin Films for Optical Systems, F. Flory ed., Vol. 49 of Optical Engineering Series (Dekker, New York, 1995), pp. 393–454.
  11. A. Bathat, M. Bouazaoui, M. Bathat, J. Mugnier, “Fluorescence of Er3+ ions in TiO2 planar waveguides prepared by a sol-gel process,” Opt. Commun. 111, 55–60 (1994). [CrossRef]
  12. M. Commandré, P. Roche, Ecole Nationale Fusubelieule de Physique, Marseille, France (private communication, 1995).
  13. P. N. Favennec, H. l’Haridon, D. Moutonnet, M. Salvi, A. C. Papadou, “Luminescence of erbium implanted in various semiconductors: IV, III–V and II–VI materials,” Electron. Lett. 25, 718–724 (1989). [CrossRef]
  14. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, J. M. Poate, “Optical doping of waveguide materials by MeV Er implantation,” J. Appl. Phys. 70, 3778–3784 (1991). [CrossRef]
  15. H. Rigneault, F. Flory, S. Monneret, S. Robert, L. Roux, “Fluorescence of Ta2O5 thin films doped by keV Er implantation: application to microcavities,” Appl. Opt. 35, 5005–5012 (1996). [CrossRef] [PubMed]

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