Silicon dioxide and hafnium dioxide evaporation characteristics from a high-frequency sweep e-beam system

Robert Chow; Nick Tsujimoto

doi:10.1364/AO.35.005095

Applied Optics
Vol. 35,
Issue 25,
pp. 5095-5101
(1996)
•https://doi.org/10.1364/AO.35.005095

Silicon dioxide and hafnium dioxide evaporation characteristics from a high-frequency sweep e-beam system

Robert Chow and Nick Tsujimoto

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Robert Chow and Nick Tsujimoto, "Silicon dioxide and hafnium dioxide evaporation characteristics from a high-frequency sweep e-beam system," Appl. Opt. 35, 5095-5101 (1996)

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Abstract

Reactive oxygen evaporation characteristics were determined as a function of the front-panel control parameters provided by a programmable, high-frequency sweep e-beam system. An experimental design strategy used deposition rate, beam speed, pattern, azimuthal rotation speed, and dwell time as the variables. The optimal settings for obtaining a broad thickness distribution, efficient silicon dioxide boule consumption, and minimal hafnium dioxide defect density were generated. The experimental design analysis showed the compromises involved with evaporating these oxides.

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Run	R	P	D	A	S	R	P	D	A	S	N _s	E	N _h	ρ
1	0	0	0	0	0	6	Circle	1/R	Med	Med	1.61	3	1.98	0.78
2	1	−1	−1	1	1	10	Fig. 8	1	Fast	Fast	1.34	1	1.66	1.32
3	0	0	1	1	0	6	Circle	1/R ²	Fast	Med	1.39	3	1.49	0.00
4	1	1	1	1	1	10	Line	1/R ²	Fast	Fast	1.12	2	1.85	4.66
5	1	1	−1	1	−1	10	Line	1	Fast	Slow	1.93	2	1.86	1.00
6	0	0	0	0	1	6	Circle	1/R	Med	Fast	1.24	3	1.42	10.86
7	−1	0	0	0	0	2	Circle	1/R	Med	Med	1.14	3	1.28	10.10
8	1	0	0	0	0	10	Circle	1/R	Med	Med	1.56	4	1.84	5.83
9	0	−1	0	0	0	6	Fig. 8	1/R	Med	Med	1.33	2	1.62	9.71
10	0	0	0	0	0	6	Circle	1/R	Med	Med	1.78	3	1.76	3.30
11	0	0	−1	0	0	6	Circle	1	Med	Med	1.66	3	1.73	9.91
12	0	0	0	−1	0	6	Circle	1/R	Slow	Med	1.58	4	1.35	7.38
13	1	1	1	−1	−1	10	Line	1/R ²	Slow	Slow	1.85	3	1.70	2.83
14	−1	1	1	1	−1	2	Line	1/R ²	Fast	Slow	1.29	2	1.63	2.14
15	1	1	−1	−1	1	10	Line	1	Slow	Fast	1.66	2	1.87	13.73
16	0	0	0	1	0	6	Circle	1/R	Fast	Med	1.82	4	1.80	5.63
17	−1	1	−1	−1	−1	2	Line	1	Slow	Slow	1.48	2	1.13	6.22
18	−1	−1	−1	−1	1	2	Fig. 8	1	Slow	Fast	1.34	1	1.71	4.66
19	0	0	0	0	−1	6	Circle	1/R	Med	Slow	1.61	4	1.16	0.78
20	0	0	0	0	0	6	Circle	1/R	Med	Med	1.48	4	1.59	3.89
21	−1	−1	−1	1	−1	2	Fig. 8	1	Fast	Slow	1.08	1	1.64	20.97
22	1	−1	−1	−1	−1	10	Fig. 8	1	Slow	Slow	1.41	2	1.62	4.01
23	−1	1	1	−1	1	2	Line	1/R ²	Slow	Fast	1.33	2	1.31	30.96
24	0	1	0	0	0	6	Line	1/R	Med	Med	1.67	4	1.73	9.30
25	−1	−1	1	−1	−1	2	Fig. 8	1/R ²	Slow	Slow	1.46	2	1.38	5.98
26	−1	−1	1	1	1	2	Fig. 8	1/R ²	Fast	Fast	1.19	1	1.25	6.62
27	1	−1	1	−1	1	10	Fig. 8	1/R ²	Slow	Fast	1.51	2	1.89	0.19
28	1	−1	1	1	−1	10	Fig. 8	1/R ²	Fast	Slow	1.94	3	2.00	6.02
29	−1	1	−1	1	1	2	Line	1	Fast	Fast	1.42	1	1.48	25.26
30	0	0	0	0	0	6	Circle	1/R	Med	Med	1.65	3	1.52	5.05

R	P	D	S	A
+1	0	−1	0	+1
+1	0	0	All	+1
+1	0	+1	−1	−1
+1	+1	−1	−1	+1
+1	+1	0	−1	+1
+1	+1	+1	−1	All
+1	−1	−1	+1	All
+1	−1	0	+1	+1
+1	−1	+1	+1	+1

Run	R	P	D	A	S	R	P	D	A	S	N _s	E	N _h	ρ
1	0	0	0	0	0	6	Circle	1/R	Med	Med	1.61	3	1.98	0.78
2	1	−1	−1	1	1	10	Fig. 8	1	Fast	Fast	1.34	1	1.66	1.32
3	0	0	1	1	0	6	Circle	1/R ²	Fast	Med	1.39	3	1.49	0.00
4	1	1	1	1	1	10	Line	1/R ²	Fast	Fast	1.12	2	1.85	4.66
5	1	1	−1	1	−1	10	Line	1	Fast	Slow	1.93	2	1.86	1.00
6	0	0	0	0	1	6	Circle	1/R	Med	Fast	1.24	3	1.42	10.86
7	−1	0	0	0	0	2	Circle	1/R	Med	Med	1.14	3	1.28	10.10
8	1	0	0	0	0	10	Circle	1/R	Med	Med	1.56	4	1.84	5.83
9	0	−1	0	0	0	6	Fig. 8	1/R	Med	Med	1.33	2	1.62	9.71
10	0	0	0	0	0	6	Circle	1/R	Med	Med	1.78	3	1.76	3.30
11	0	0	−1	0	0	6	Circle	1	Med	Med	1.66	3	1.73	9.91
12	0	0	0	−1	0	6	Circle	1/R	Slow	Med	1.58	4	1.35	7.38
13	1	1	1	−1	−1	10	Line	1/R ²	Slow	Slow	1.85	3	1.70	2.83
14	−1	1	1	1	−1	2	Line	1/R ²	Fast	Slow	1.29	2	1.63	2.14
15	1	1	−1	−1	1	10	Line	1	Slow	Fast	1.66	2	1.87	13.73
16	0	0	0	1	0	6	Circle	1/R	Fast	Med	1.82	4	1.80	5.63
17	−1	1	−1	−1	−1	2	Line	1	Slow	Slow	1.48	2	1.13	6.22
18	−1	−1	−1	−1	1	2	Fig. 8	1	Slow	Fast	1.34	1	1.71	4.66
19	0	0	0	0	−1	6	Circle	1/R	Med	Slow	1.61	4	1.16	0.78
20	0	0	0	0	0	6	Circle	1/R	Med	Med	1.48	4	1.59	3.89
21	−1	−1	−1	1	−1	2	Fig. 8	1	Fast	Slow	1.08	1	1.64	20.97
22	1	−1	−1	−1	−1	10	Fig. 8	1	Slow	Slow	1.41	2	1.62	4.01
23	−1	1	1	−1	1	2	Line	1/R ²	Slow	Fast	1.33	2	1.31	30.96
24	0	1	0	0	0	6	Line	1/R	Med	Med	1.67	4	1.73	9.30
25	−1	−1	1	−1	−1	2	Fig. 8	1/R ²	Slow	Slow	1.46	2	1.38	5.98
26	−1	−1	1	1	1	2	Fig. 8	1/R ²	Fast	Fast	1.19	1	1.25	6.62
27	1	−1	1	−1	1	10	Fig. 8	1/R ²	Slow	Fast	1.51	2	1.89	0.19
28	1	−1	1	1	−1	10	Fig. 8	1/R ²	Fast	Slow	1.94	3	2.00	6.02
29	−1	1	−1	1	1	2	Line	1	Fast	Fast	1.42	1	1.48	25.26
30	0	0	0	0	0	6	Circle	1/R	Med	Med	1.65	3	1.52	5.05

R	P	D	S	A
+1	0	−1	0	+1
+1	0	0	All	+1
+1	0	+1	−1	−1
+1	+1	−1	−1	+1
+1	+1	0	−1	+1
+1	+1	+1	−1	All
+1	−1	−1	+1	All
+1	−1	0	+1	+1
+1	−1	+1	+1	+1

Abstract

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Figures (6)

Tables (2)

Equations (11)

Applied Optics