Determination of refractive-index profiles by a combination of visible and infrared ellipsometry measurements
Applied Optics, Vol. 35, Issue 28, pp. 5540-5544 (1996)
http://dx.doi.org/10.1364/AO.35.005540
Acrobat PDF (339 KB)
Abstract
Model inhomogeneous silicon oxynitride films were produced by ion-beam sputtering and characterized by ellipsometry in the visible and infrared ranges. These films exhibit strong intentional gradients of the refractive index that cannot be considered linear. A discrete description of the index profile with a few layers or a continuous description with a polynomial are examined; regressions by the use of measurements in the visible only or in the total spectral range (visible and infrared) are performed. Acquisition of data in an extended range is found to be a guarantee of the reliability of the calculated index profiles.
© 1996 Optical Society of America
Citation
V. Nguyen Van, A. Brunet-Bruneau, S. Fisson, J. M. Frigerio, G. Vuye, Y. Wang, F. Abelνs, J. Rivory, M. Berger, and P. Chaton, "Determination of refractive-index profiles by a combination of visible and infrared ellipsometry measurements," Appl. Opt. 35, 5540-5544 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-28-5540
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
« Previous Article | Next Article »
OSA is a member of 