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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 28 — Oct. 1, 1996
  • pp: 5553–5556

Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films

Alexander Zuber, Heidrun Jänchen, and Norbert Kaiser  »View Author Affiliations


Applied Optics, Vol. 35, Issue 28, pp. 5553-5556 (1996)
http://dx.doi.org/10.1364/AO.35.005553


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Abstract

A new measurement technique for the characterization of uniaxial as well as biaxial anisotropic surfaces and thin films is introduced. This technique is based on perpendicular-incidence photometric ellipsometry, in which a spectral-photometric dynamic ellipsometer with a rotating polarizer is used. This method is sensitive, contactless, nondestructive, and efficient for the estimation of anisotropic behavior. Furthermore, the spectroscopic measurement directly provides the anisotropy dispersion down to the UV wavelength range. Results on structurally anisotropic HfO2 coatings are presented.

© 1996 Optical Society of America

History
Original Manuscript: November 8, 1995
Revised Manuscript: March 18, 1996
Published: October 1, 1996

Citation
Alexander Zuber, Heidrun Jänchen, and Norbert Kaiser, "Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films," Appl. Opt. 35, 5553-5556 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-28-5553


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References

  1. J. M. Nieuwenhuizen, H. B. Haanstra, “Mikrofraktographie dünner Schichten,” Philips Tech. Rundsch. 27, 177–181 (1966).
  2. F. Horowitz, “Structure-induced optical anisotropy in thin films,” Ph.D. dissertation (University of Arizona, Tucson, Ariz., 1983).
  3. F. Flory, D. Endelema, E. Pelletier, I. Hodgkinson, “Anisostropy in thin films: modeling and measurement of guided and nonguided optical properties: application to TiO2 films,” Appl. Opt. 32, 5649–5659 (1993). [CrossRef] [PubMed]
  4. H. Jänchen, D. Endelema, N. Kaiser, F. Flory, “Determination of the refractive indices of highly biaxial anisotropic coatings using guided modes,” Pure Appl. Opt. 5, 405–415 (1996). [CrossRef]
  5. Q. H. Wu, I. Hodgkinson, “Transmission-mode perpendicular ellipsometry of anisotropic thin films,” J. Opt. (Paris) 25, 43–49 (1994). [CrossRef]
  6. R. M. A. Azzam, “Perpendicular-incidence photometric ellipsometry (PIPE) of surfaces with arbitary anisotropy,” J. Opt. (Paris) 12, 317–321 (1981). [CrossRef]

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