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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 31 — Nov. 1, 1996
  • pp: 6261–6266

Integrated optic head for sensing a two-dimensional displacement of a grating scale

Shogo Ura, Toshiaki Endoh, Toshiaki Suhara, and Hiroshi Nishihara  »View Author Affiliations


Applied Optics, Vol. 35, Issue 31, pp. 6261-6266 (1996)
http://dx.doi.org/10.1364/AO.35.006261


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Abstract

An integrated optic sensor head was proposed for sensing a two-dimensional displacement of a scale consisting of crossed gratings. Two interferometers, crossing each other, are constructed by the integration of two pairs of linearly focusing grating couplers (LFGC's) and two pairs of photodiodes (PD's) on a Si substrate. Four beams radiated by the LFGC's from the sensor head overlap on the grating scale, and the beams are diffracted by the grating scale and interfere on the PD's. The period of the interference signal variation is just half of the scale grating period. The device was designed and fabricated with a grating scale of 3.2-μm period, and the sensing principle was experimentally confirmed.

© 1996 Optical Society of America

History
Original Manuscript: March 14, 1996
Published: November 1, 1996

Citation
Shogo Ura, Toshiaki Endoh, Toshiaki Suhara, and Hiroshi Nishihara, "Integrated optic head for sensing a two-dimensional displacement of a grating scale," Appl. Opt. 35, 6261-6266 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-31-6261


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References

  1. M. Izutsu, A. Enokihara, T. Sueta, “Optical-waveguide microdisplacement sensor,” Electron. Lett. 18, 867–868 (1982). [CrossRef]
  2. P. Gidon, S. Valette, P. Schweizer, “Vibration sensor using planar integrated interferometer circuit on oxidised silicon substrate,” presented at the International Conference of Optical Fiber Sensors '84, 5–7 September 1984, Stuttgart, Germany.
  3. T. Yamashita, J. Takagi, “Integrated optic microdisplacement sensor using two asymmetric x junctions and a lod lens,” presented at the International Conference on Optical Fiber Sensors '86, 7–9 October 1986, Tokyo.
  4. S. Ura, T. Suhara, H. Nishihara, “Integrated-optic interferometer position sensor,” J. Lightwave Technol. 7, 270–273 (1989). [CrossRef]
  5. T. Suhara, T. Taniguchi, M. Uemukai, H. Nishihara, T. Hirata, S. Iio, M. Suehiro, “Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser,” Photon. Technol. Lett. 7, 1195–1197 (1995). [CrossRef]
  6. H. Toda, M. Haruna, H. Nishihara, “Integrated-optic heterodyne interferometer for displacement measurement,” J. Lightwave Technol. 9, 683–687 (1991). [CrossRef]
  7. D. Jestel, A. Baus, E. Voges, “Integrated-optic displacement sensor in glass with 1 nm resolution,” in Integrated Photonics Research, Vol. 8 of 1991 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1991), paper ThE2.
  8. D. Hofstetter, H. P. Zappe, R. Dändliker, “Monolithically integrated optical displacement sensor in GaAs/AlGaAs,” Electron. Lett. 31, 2121–2122 (1995). [CrossRef]
  9. B. Geh, A. Dorsel, “Integrated optical grating scale readout employing a double grating,” Appl. Opt. 31, 5241–5245 (1992). [CrossRef] [PubMed]
  10. S. Ura, M. Shinohara, T. Suhara, H. Nishihara, “Integrated-optic grating-scale-displacement sensor using linearly focusing grating couplers,” IEEE Photon. Technol. Lett. 6, 239–241 (1994). [CrossRef]
  11. S. Ura, T. Endoh, T. Suhara, H. Nishihara, “Linearly focusing grating couplers for sensing 2-dimensional grating-scale displacement,” presented at the Topical Meeting of the International Commission on Optics '94, 4–8 April 1994, Kyoto, Japan.
  12. S. Ura, T. Endoh, T. Suhara, H. Nishihara, “Integrated-optic head for sensing two-dimensional displacement of grating scale,” presented at the Tenth International Conference on Integrated Optics and Optical Fibre Communications, 26–30 June 1995, Hong Kong.
  13. A. Katzir, A. C. Livanos, J. B. Shellan, A. Yariv, “Chirped gratings in integrated optics,” IEEE J. Quantum Electron. QE-13, 296–304 (1977). [CrossRef]
  14. S. Ura, Y. Furukawa, T. Suhara, H. Nishihara, “Linearly focusing grating coupler for integrated-optic parallel pickup,” J. Opt. Soc. Am. A 7, 1759–1763 (1990). [CrossRef]
  15. S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An integrated-optic disk pickup device,” J. Lightwave Technol. 4, 913–918 (1986). [CrossRef]

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