OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 33 — Nov. 20, 1996
  • pp: 6599–6604

Simulation of light scattering from a particle upon a wafer surface

Yu. Eremin and N. Orlov  »View Author Affiliations


Applied Optics, Vol. 35, Issue 33, pp. 6599-6604 (1996)
http://dx.doi.org/10.1364/AO.35.006599


View Full Text Article

Enhanced HTML    Acrobat PDF (415 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We simulated light scattering from a particle located on a smooth surface. We developed a new approach utilizing the discrete sources method based on a strict mathematical model for this scattering problem. The main features of the corresponding numerical algorithm are presented. The results of modeling and comparisons with other theoretical results and experimental data are shown as well.

© 1996 Optical Society of America

History
Original Manuscript: October 6, 1995
Revised Manuscript: April 22, 1996
Published: November 20, 1996

Citation
Yu. Eremin and N. Orlov, "Simulation of light scattering from a particle upon a wafer surface," Appl. Opt. 35, 6599-6604 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-33-6599

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited