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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 33 — Nov. 20, 1996
  • pp: 6599–6604

Simulation of light scattering from a particle upon a wafer surface

Yu. Eremin and N. Orlov  »View Author Affiliations


Applied Optics, Vol. 35, Issue 33, pp. 6599-6604 (1996)
http://dx.doi.org/10.1364/AO.35.006599


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Abstract

We simulated light scattering from a particle located on a smooth surface. We developed a new approach utilizing the discrete sources method based on a strict mathematical model for this scattering problem. The main features of the corresponding numerical algorithm are presented. The results of modeling and comparisons with other theoretical results and experimental data are shown as well.

© 1996 Optical Society of America

History
Original Manuscript: October 6, 1995
Revised Manuscript: April 22, 1996
Published: November 20, 1996

Citation
Yu. Eremin and N. Orlov, "Simulation of light scattering from a particle upon a wafer surface," Appl. Opt. 35, 6599-6604 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-33-6599


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References

  1. H. Huff, R. Goodall, E. Williams, B. Liu, T. Warner, D. Hirleman, K. Gildersleeve, W. Murray, B. Scheer, “Measurement of silicon particles by laser surface scanning and angle-resolved light scattering,” in SEMATECH Meeting: Particle Counting/Microroughness Task Force (Minneapolis, 23–24 June 1994), p. 5.
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  3. M. A. Taubenblatt, T. K. Tran, “Calculation of light scattering from particles and structures on a surface by the coupled-dipole method,” J. Opt. Soc. Am. A 10, 912–919 (1993). [CrossRef]
  4. Yu. Eremin, A. Sveshnikov, “Discrete sources method in electromagnetic scatterer problems,” Electromagnetics 13, 203–216 (1993). [CrossRef]
  5. A. Sveshnikov, Yu. Yeremin, N. Orlov, “Study of some mathematical models in the theory of diffraction by the method of non-orthogonal series,” Sov. J. Commun. Technol. Electron. 30(7), 73–81 (1985).
  6. Yu. Eremin, N. Orlov, A. Sveshnikov, “Electromagnetic scattering analysis based on discrete sources method,” ACES J. 9(3), 46–56 (1994).
  7. H. Lee, S. Chae, Y. Ye, D. Pui, G. Wojcik, “Theoretical and experimental particle size response of wafer surface scanners,” Aerosol Sci. Technol. 14, 177–192 (1991). [CrossRef]
  8. G. Wojcik, D. Vaughan, L. Galbraith, “Calculation of light scattering from structures on silicon surfaces,” in Lasers in Microlithography, J. S. Batchelder, O. J. Ehrlich, J. Y. Tsao, eds., Proc. SPIE 774, 21–31 (1987).
  9. L. Clementy, M. Fossey, A. Rakhmanov, “The experimental study of the angular scattering distribution of the PSL particle placed on silicone substrate,” in Report of ADE and ADE Optical System Research Laboratory (ADE Optical System Corporation, Charlotte, N.C., 1994).

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