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Applied Optics

Applied Optics


  • Vol. 35, Iss. 33 — Nov. 20, 1996
  • pp: 6599–6604

Simulation of light scattering from a particle upon a wafer surface

Yu. Eremin and N. Orlov  »View Author Affiliations

Applied Optics, Vol. 35, Issue 33, pp. 6599-6604 (1996)

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We simulated light scattering from a particle located on a smooth surface. We developed a new approach utilizing the discrete sources method based on a strict mathematical model for this scattering problem. The main features of the corresponding numerical algorithm are presented. The results of modeling and comparisons with other theoretical results and experimental data are shown as well.

© 1996 Optical Society of America

Original Manuscript: October 6, 1995
Revised Manuscript: April 22, 1996
Published: November 20, 1996

Yu. Eremin and N. Orlov, "Simulation of light scattering from a particle upon a wafer surface," Appl. Opt. 35, 6599-6604 (1996)

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  1. H. Huff, R. Goodall, E. Williams, B. Liu, T. Warner, D. Hirleman, K. Gildersleeve, W. Murray, B. Scheer, “Measurement of silicon particles by laser surface scanning and angle-resolved light scattering,” in SEMATECH Meeting: Particle Counting/Microroughness Task Force (Minneapolis, 23–24 June 1994), p. 5.
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  9. L. Clementy, M. Fossey, A. Rakhmanov, “The experimental study of the angular scattering distribution of the PSL particle placed on silicone substrate,” in Report of ADE and ADE Optical System Research Laboratory (ADE Optical System Corporation, Charlotte, N.C., 1994).

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