OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 35, Iss. 4 — Feb. 1, 1996
  • pp: 701–707

Surface morphologies of sputter-deposited aluminum films studied using a high-resolution phase-measuring laser interferometric microscope

Masakazu Furukawa, Yoshito Yamamoto, Hiroshi Ikakura, Nobuo Tanaka, Masayuki Hashimoto, Atsushi Sano, and Shoso Shingubara  »View Author Affiliations


Applied Optics, Vol. 35, Issue 4, pp. 701-707 (1996)
http://dx.doi.org/10.1364/AO.35.000701


View Full Text Article

Enhanced HTML    Acrobat PDF (496 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Sputter-deposited aluminum (Al) film surface morphologies were studied with a new nondestructive method that incorporates a high-resolution phase-measuring laser interferometric microscope. Good correlation is obtained between rms roughness and reflectivity for various conditions of temperature and argon gas pressure. It should be noted that the rms roughness is much more sensitive than reflectivity when reflectivity exceeds 90%. A drastic change is observed in the temperature dependence of the rms roughness and the skewness at 200 °C. As a result there are changes in Al grain sizes and surface morphologies based on concomitant scanning electron microscope observations. We found that the rms roughness value depends on the resolution of the objective especially when the Al grain sizes are comparable to the resolution.

© 1996 Optical Society of America

History
Original Manuscript: April 18, 1995
Revised Manuscript: August 10, 1995
Published: February 1, 1996

Citation
Masakazu Furukawa, Yoshito Yamamoto, Hiroshi Ikakura, Nobuo Tanaka, Masayuki Hashimoto, Atsushi Sano, and Shoso Shingubara, "Surface morphologies of sputter-deposited aluminum films studied using a high-resolution phase-measuring laser interferometric microscope," Appl. Opt. 35, 701-707 (1996)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-4-701

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited