Large, high-frame-rate spatial light modulators are key components required for the realization of real-time optical processors. We report a 128 × 128 array of GaAs-based optical modulators that we hybridized to a Si integrated circuit by using In bump bonds to form a spatial light modulator. These optical modulators are composed of a series of quantum wells within an asymmetric Fabry-Perot cavity to control the optical properties. The resulting 128 × 128 element array operates in an intensity-only reflection mode at greater than 100,000 frames per second. This array interfaces to a 486-based personal computer through a standard industry standard architecture bus.
© 1996 Optical Society of America
T. L. Worchesky, K. J. Ritter, R. Martin, and B. Lane, "Large arrays of spatial light modulators hybridized to silicon integrated circuits," Appl. Opt. 35, 1180-1186 (1996)