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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 10 — Apr. 1, 1997
  • pp: 2178–2182

Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer

Shuichi Kawabata, Masahiro Motoki, and Hidesi Yokota  »View Author Affiliations


Applied Optics, Vol. 36, Issue 10, pp. 2178-2182 (1997)
http://dx.doi.org/10.1364/AO.36.002178


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Abstract

In photometric ellipsometry the optical signal is transformed into an electrical signal by a photodetector, and it passes an electronic system to reduce the noise and to amplify the signal. But inherently it will induce a phase shift and an amplitude attenuation of the output signal. Such a specific characteristic of an electronic system depends on the angular frequency of the signal and gives systematic errors to the results of the measurement of rotating-analyzer ellipsometry. We propose a modified method of measurement that enables us to calibrate the electronic system in the ellipsometric measurement configuration.

© 1997 Optical Society of America

History
Original Manuscript: January 19, 1996
Revised Manuscript: August 5, 1996
Published: April 1, 1997

Citation
Shuichi Kawabata, Masahiro Motoki, and Hidesi Yokota, "Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer," Appl. Opt. 36, 2178-2182 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-10-2178


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