We report on thin-film photodetectors optimized for detecting the vacuum UV and rejection of the visible spectrum of electromagnetic radiation. The devices are made of hydrogenated amorphous silicon and silicon carbide on a glass substrate. At room temperature the photodetectors exhibit quantum efficiencies of 52% at λ = 58.4 nm, 1% at λ = 400 nm, and 0.1% at λ = 650 nm. The response time for UV pulses from an N2 laser gives signals of 6-µs full width at half-maximum and 500-ns rise time.
© 1997 Optical Society of America
Original Manuscript: January 17, 1996
Revised Manuscript: June 24, 1996
Published: May 1, 1997
Giampiero De Cesare, Fernanda Irrera, Fabrizio Palma, Giampiero Naletto, Piergiorgio Nicolosi, and Ermanno Jannitti, "Thin-film photodetectors for the vacuum ultraviolet spectral region," Appl. Opt. 36, 2751-2754 (1997)