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Applied Optics

Applied Optics


  • Vol. 36, Iss. 13 — May. 1, 1997
  • pp: 2751–2754

Thin-film photodetectors for the vacuum ultraviolet spectral region

Giampiero De Cesare, Fernanda Irrera, Fabrizio Palma, Giampiero Naletto, Piergiorgio Nicolosi, and Ermanno Jannitti  »View Author Affiliations

Applied Optics, Vol. 36, Issue 13, pp. 2751-2754 (1997)

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We report on thin-film photodetectors optimized for detecting the vacuum UV and rejection of the visible spectrum of electromagnetic radiation. The devices are made of hydrogenated amorphous silicon and silicon carbide on a glass substrate. At room temperature the photodetectors exhibit quantum efficiencies of 52% at λ = 58.4 nm, 1% at λ = 400 nm, and 0.1% at λ = 650 nm. The response time for UV pulses from an N2 laser gives signals of 6-µs full width at half-maximum and 500-ns rise time.

© 1997 Optical Society of America

Original Manuscript: January 17, 1996
Revised Manuscript: June 24, 1996
Published: May 1, 1997

Giampiero De Cesare, Fernanda Irrera, Fabrizio Palma, Giampiero Naletto, Piergiorgio Nicolosi, and Ermanno Jannitti, "Thin-film photodetectors for the vacuum ultraviolet spectral region," Appl. Opt. 36, 2751-2754 (1997)

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  1. J. Janesick, T. Elliot, G. Fraschetti, S. Collins, M. Blouke, B. Corrie, “Charge-coupled device pinning technologies,” in Optical Sensors and Electronic Photography, M. M. Blouke, D. Pophal, eds., Proc. SPIE1071, 153–169 (1989). [CrossRef]
  2. J. L. Wiza, “Microchannel plated detector,” Nucl. Instrum. Methods 162, 587–601 (1979). [CrossRef]
  3. O. H. W. Siegmund, M. A. Gumming, J. Stock, D. Marsh, “Microchannel imaging detectors for the ultraviolet,” in Proceedings of the ESA Symposium on Photon Detection for Space Instrumentation, (European Space Agency, Paris Cedex, 1992), pp. 89–96.
  4. V. Kumar, A. K. Datta, “Vacuum ultraviolet scintillators: sodium salicylite and p-terpheyl,” Appl. Opt. 18, 1414–1417 (1979). [CrossRef] [PubMed]
  5. W. M. Burton, B. A. Powell, “Fluorescence of tetraphenil-butadiene in the vacuum ultraviolet,” Appl. Opt. 12, 87–89 (1973). [CrossRef] [PubMed]
  6. G. de Cesare, F. Irrera, F. Palma, M. Tucci, E. Jannitti, P. Naletto, P. Nicolosi, “Amorphous silicon–silicon carbide photodiodes with excellent sensitivity and selectivity in the vacuum ultraviolet spectrum,” Appl. Phys. Lett. 67, 335–337 (1995). [CrossRef]
  7. Y. K. Fang, S.-B. Hwang, K.-H. Chen, C.-R. Liu, M.-J. Tsai, L.-C. Kuo, “An amorphous SiC/Si heterojunction p–i–n diode for low-noise and high-sensitivity UV detector,” IEEE Trans. Electron Devices ED-39, 292–296 (1992).
  8. J. R. Fieberg, R. S. Muller, “Pair-production energies in silicon and germanium bombarded with low-energy electrons,” J. Appl. Phys. 43, 3202–3208 (1972). [CrossRef]
  9. G. de Cesare, F. Galluzzi, G. Guattari, G. Leo, R. Vincenzoni, E. Bemporad, “Structural, optical and electronic properties of wide band gap amorphous carbon–silicon alloys,” Diam. Related Mater. 2, 773–777 (1993). [CrossRef]
  10. H. Weinert, M. Petrauskas, J. Kolenda, A. Galecka, F. Wang, R. Schwarz, “Ambipolar diffusion coefficient in a-SiC:H alloys in steady state and transient grating measurements,” in Proceedings of the Materials Research Society Symposium (Materials Research Society, Pittsburgh, Pa., 1993), Vol. 297, pp. 497–503. [CrossRef]
  11. G. de Cesare, V. Iorio, F. Irrera, F. Palma, M. Tucci, “Amorphous silicon UV photodetectors with rejection of the visible spectrum,” J. Non-Crystalline Solids 198–200, 1198–1201 (1996). [CrossRef]

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