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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 13 — May. 1, 1997
  • pp: 2897–2904

Extreme ultraviolet scatterometer: design and capability

Michael P. Newell and Ritva A. M. Keski-Kuha  »View Author Affiliations


Applied Optics, Vol. 36, Issue 13, pp. 2897-2904 (1997)
http://dx.doi.org/10.1364/AO.36.002897


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Abstract

A scatterometer capable of plane-of-incidence bidirectional reflectance distribution function (BRDF) measurements at extreme ultraviolet wavelengths between 58.4 and 121.6 nm has been developed. This instrument has a lower measurement limit of approximately 10<sup>−5</sup> sr<sup>−1</sup>, and it is able to accommodate angles of incidence between 10° and 75°. The scatterometer can measure scatter to within 1.5° of the specular beam, and the scatter angle can be measured to within 0.1°. The design, analysis, and performance of this instrument are discussed here. Scatter data, in the form of BRDF measurements, are presented for a 3000-line/mm grating and a flat chemical vapor deposited diamond sample.

© 1997 Optical Society of America

Citation
Michael P. Newell and Ritva A. M. Keski-Kuha, "Extreme ultraviolet scatterometer: design and capability," Appl. Opt. 36, 2897-2904 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-13-2897


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