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Applied Optics

Applied Optics


  • Vol. 36, Iss. 13 — May. 1, 1997
  • pp: 2897–2904

Extreme ultraviolet scatterometer: design and capability

Michael P. Newell and Ritva A. M. Keski-Kuha  »View Author Affiliations

Applied Optics, Vol. 36, Issue 13, pp. 2897-2904 (1997)

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A scatterometer capable of plane-of-incidence bidirectional reflectance distribution function (BRDF) measurements at extreme ultraviolet wavelengths between 58.4 and 121.6 nm has been developed. This instrument has a lower measurement limit of approximately 10<sup>−5</sup> sr<sup>−1</sup>, and it is able to accommodate angles of incidence between 10° and 75°. The scatterometer can measure scatter to within 1.5° of the specular beam, and the scatter angle can be measured to within 0.1°. The design, analysis, and performance of this instrument are discussed here. Scatter data, in the form of BRDF measurements, are presented for a 3000-line/mm grating and a flat chemical vapor deposited diamond sample.

© 1997 Optical Society of America

Michael P. Newell and Ritva A. M. Keski-Kuha, "Extreme ultraviolet scatterometer: design and capability," Appl. Opt. 36, 2897-2904 (1997)

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  1. F. E. Nicodemus, J. C. Richmond, J. J. Hsia, I. W. Ginsberg, and T. Limperis, “Geometric considerations and nomenclature for reflectance,” NBS Monograph 160 (U.S. Department of Commerce, Washington, D.C., 1977).
  2. J. E. Harvey, “Light-scattering characteristics of optical surfaces,” Ph.D. dissertation (University of Arizona, Tucson, Ariz., 1976).
  3. R. P. Young, “Low-scatter mirror degradation by particle contamination,” Opt. Eng. 15, 516–520 (1976).
  4. L. D. Brooks, “Microprocessor-based instrumentation for BRDF measurement from visible to FIR,” Ph.D. dissertation (University of Arizona, Tucson, Ariz., 1982).
  5. T. F. Schiff, M. W. Knighton, D. J. Wilson, F. M. Cady, J. C. Stover, and J. J. Butler, “Design review of a high accuracy UV to near IR scatterometer,” in Optical Scattering: Applications, Measurement, and Theory II, J. C. Stover, ed., Proc. SPIE 1995, 121–130 (1993).
  6. R. J. Castonguay, “A new generation high speed, high resolution, hemispherical scatterometer,” in Optical Scattering: Applications, Measurement, and Theory II, J. C. Stover, ed., Proc. SPIE 1995, 152–165 (1993).
  7. R. J. Castonguay and T. D. Ferguson, “Accuracy and repeatability results of OMNISCATR, a high speed, high resolution, three dimensional scatterometer,” in Stray Radiation in Optical Systems III, R. P. Breault, ed., Proc. SPIE 2260, 74–82 (1994).
  8. J. C. Stover, J. Rifkin, D. R. Cheever, K. H. Kirchner, and T. F. Schiff, “Comparison of wavelength scaling data to experiment,” in Stray Light and Contamination in Optical Systems, R. P. Breault, ed., Proc. SPIE 967, 44–49 (1988).
  9. C. L. Vernold, “Application and verification of wavelength scaling for near specular scatter prediction,” in Scatter from Optical Components, J. C. Stover, ed., Proc. SPIE 1165, 18–30 (1989).
  10. L. Mattsson, J. Ingers, and J. M. Bennett, “Wavelength dependence of angle-resolved scattering in the extreme-ultraviolet-visible region,” Appl. Opt. 33, 3523–3532 (1994).
  11. W. L. Wolfe, “Incident angle invariance in surface scatter,” in Scatter from Optical Components, J. C. Stover, ed., Proc. SPIE 1165, 10–17 (1989).
  12. E. L. Church and J. M. Zavada, “Residual surface roughness of diamond-turned optics,” Appl. Opt. 14, 1788–1795 (1975).
  13. E. L. Church, H. A. Jenkinson, and J. M. Zavada, “Measurement of the finish of diamond-turned metal surfaces by differential light scattering,” Opt. Eng. 16, 360–374 (1977).
  14. APART software, Breault Research Organization, Tucson, Ariz.
  15. R. P. Breault, “Stray light technology overview in 1988,” in Stray Light and Contamination in Optical Systems, R. P. Breault, ed., Proc. SPIE 967, 2–9 (1988).
  16. R. P. Breault, “Stray light technology overview of the 1980 decade (and a peek into the future),” in Stray Radiation in Optical Systems, R. P. Breault, ed., Proc. SPIE 1331, 2–11 (1990).
  17. H. Hogrefe, R. Haelbich, and C. Kunz, “Specular and diffuse reflection of soft x-rays from mirrors,” Nucl. Instrum. Methods A 246, 198–202 (1986).
  18. H. Hogrefe and C. Kunz, “Soft x-ray scattering from rough surfaces: experimental and theoretical analysis,” Appl. Opt. 26, 2851–2859 (1987).
  19. J. M. Elson, V. Rehn, J. M. Bennett, and V. O. Jones, “Measurement of angle resolved light scattering from optical surfaces in the 75 to 750 eV range,” in Reflecting Optics for Synchrotron Radiation, M. R. Howells, ed., Proc. SPIE 315, 193–201 (1981).
  20. L. Mattsson and S. Johansson, “Quality control and ageing tests on replicated, Al/MgF2 coated aspheric mirrors for the far UV,” in Thin Film Technologies, J. R. Jacobsson, ed., Proc. SPIE 652, 124–133 (1986).
  21. L. Mattsson, “Instrument for angle-resolved measurement of scattered light in the VUV-visible wavelength region,” in Measurement and Effects of Surface Defects and Quality of Polish, H. E. Bennett, ed., Proc. SPIE 525, 189–196 (1985).
  22. R. G. Johnston, L. R. Canfield, and R. P. Madden, “Reflective scattering from substrates and evaporated films in the far ultraviolet,” Appl. Opt. 6, 719–722 (1967).
  23. M. C. Johnson, “Vacuum ultraviolet scattering distributions,” Appl. Opt. 7, 879–881 (1968).
  24. J. B. Heaney, Handbook of Optics, Vol. 2 (McGraw-Hill, New York, 1995) pp. 37.23–37.29.
  25. P. Jelinsky and S. Jelinsky, “Low reflectance EUV materials: a comparative study,” Appl. Opt. 26, 613–615 (1987).
  26. C. Morbey and J. B. Hutchings, “Telescope baffle performance for Lyman Far Ultraviolet Spectrographic Explorer,” Appl. Opt. 32, 3570–3584 (1993).
  27. T. Zurbuchen, P. Bochsler, and F. Scholze, “Reflection of ultraviolet light at 121.6 nm from rough surfaces,” Opt. Eng. 34, 1303–1315 (1995).
  28. T. T. Saha, D. B. Leviton, and D. Glenn, “Performance of ion-figured SiC SUMER telescope mirror in VUV,” Appl. Opt. 35, 1742–1750 (1996).
  29. T. T. Saha and D. B. Leviton, “Theoretical and measured encircled energy and wide angle scatter of SUMER demonstration telescope mirror in FUV,” in Space Astronomical Telescopes and Instruments II, P. Y. Bely, ed., Proc. SPIE 1945, 398–409 (1993).
  30. “Standard practice for angle resolved optical scatter measurements on specular or diffuse surfaces,” ASTM Standard E 1392–90 (American Society for Testing and Materials, Philadelphia, Pa).
  31. W. R. Hunter, “On the cause of errors in reflectance vs angle of incidence measurements and the design of reflectometers to eliminate the errors,” Appl. Opt. 6, 2140 (1967).
  32. J. A. R. Samson, Techniques of Vacuum Ultraviolet Spectroscopy (Wiley, New York, 1967).
  33. M. J. Kristo and C. G. Enke, “System for simultaneous count/current measurement with a dual-mode photon/particle detector,” Rev. Sci. Instrum. 59, 438–442 (1988).
  34. M. J. Kristo and C. G. Enke, Channeltron Electron Multiplier Handbook for Mass Spectrometry Applications (Galileo Electro-Optics Corporation, Sturbridge, Mass., 1991).
  35. T. A. Leonard and M. Pantoliano, “BRDF round robin,” in Stray Light and Contamination in Optical Systems, R. P. Breault, ed., Proc. SPIE 967, 226–235 (1988).
  36. T. A. Leonard, M. Pantoliano, and J. Reilly, “Results of a CO2 BRDF round robin,” in Scatter from Optical Components, J. C. Stover, ed., Proc. SPIE 1165, 444 (1989).
  37. R. A. M. Keski-Kuha, Goddard Space Flight Center, Greenbelt, Md. 20771 (personal communication).
  38. M. P. Newell and R. A. M. Keski-Kuha, “BRDF of diffuse EUV scatterers and EUV baffle materials,” to be published in Appl. Opt.
  39. M. P. Newell, L. A. Whitlock, R. A. M. Keski-Kuha, and J. J. Jackson, “Extreme ultraviolet scatter from particulate contaminated mirrors,” in Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, J. C., Stover, ed., Proc. SPIE 2541, 174–185 (1995).

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