Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Raman scattering as a characterization tool for epitaxial GaN thin films grown on sapphire by turbo disk metal-organic chemical vapor deposition

Not Accessible

Your library or personal account may give you access

Abstract

Thin layers of GaN, a few micrometers thick, grown on sapphire substrate, are the basic structure in the rapidly developing GaN-based blue optoelectronics devices. We are looking for nondestructive, effective, and convenient characterization tools for GaN/sapphire. Ordinary Raman scattering measurements have limited use because strong Raman signals from the sapphire substrate overwhelm the GaN Raman features. We describe two techniques for making commercial laser Raman systems serve as convenient characterization tools for GaN/sapphire. One uses a near right-angle laser beam incidence, and the other uses microscope lens focusing. In these two ways the detected GaN Raman signals are much stronger than sapphire features, and correct assignments can be made quickly.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Investigation of high indium-composition InGaN/GaN heterostructures on ZnO grown by metallic organic chemical vapor deposition

M. Tian, Y. D. Qian, C. Zhang, L. Li, S. D. Yao, I. T. Ferguson, D. N. Talwar, J. Y. Zhai, D. H. Meng, K. Y. He, L. Y. Wan, and Z. C. Feng
Opt. Mater. Express 8(10) 3184-3196 (2018)

Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate

Teng Jiang, Shengrui Xu, Jincheng Zhang, Peixian Li, Jun Huang, Zeyang Ren, Mengdi Fu, Jiaduo Zhu, Hengsheng Shan, Ying Zhao, and Yue Hao
Opt. Mater. Express 6(6) 1817-1826 (2016)

Characteristics of doping controllable ZnO films grown by photo-assisted metal organic chemical vapor deposition

Tian-Hong Feng and Xiao-Chuan Xia
Opt. Mater. Express 7(4) 1281-1288 (2017)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved