Abstract

A laboratory model of a layered structure with a rough upper surface (a glass microscope slide cut with a diamond saw) is used to obtain optical polarimetric data. Scatterometer measurements were made of all the Mueller matrix elements associated with light scattered in arbitrary directions. (A preliminary measurement of scattering from a smooth opaque gold film on a silicon wafer was used to validate the calculation of the Mueller matrix elements.) These measurements are compared with corresponding analytical solutions based on the full-wave approach. Physical interpretations of the analytical solutions that account for scattering upon reflection and transmission across rough interfaces are given in a companion paper. The agreement between calculations and measurements suggests that the full wave, polarimetric solutions can provide a reliable database for electromagnetic detection of rough surfaces in remote-sensing applications.

© 1997 Optical Society of America

Computations of the Mueller matrix elements for scattering from layered structures with rough surfaces, with applications to optical detection

Ezekiel Bahar and Robert D. Kubik
Appl. Opt. 36(13) 2947-2955 (1997)

Investigation of rough surfaces and transparent birefringent samples with Mueller-matrix scatterometry

Françoise H. Delplancke
Appl. Opt. 36(30) 7621-7628 (1997)

Automated high-speed Mueller matrix scatterometer

F. Delplancke
Appl. Opt. 36(22) 5388-5395 (1997)

Scattering–reduction effect with overcoated rough surfaces: theory and experiment

H. Giovannini and C. Amra
Appl. Opt. 36(22) 5574-5579 (1997)

Identification of contaminant coatings over rough surfaces using polarized infrared scattering

S. Mark Haugland, Ezekiel Bahar, and Arthur H. Carrieri
Appl. Opt. 31(19) 3847-3852 (1992)