OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 19 — Jul. 1, 1997
  • pp: 4409–4410

Performance of high-density cast silicon carbide in the extreme ultraviolet

Ritva A. M. Keski-Kuha, Charles M. Fleetwood, and Joseph Robichaud  »View Author Affiliations


Applied Optics, Vol. 36, Issue 19, pp. 4409-4410 (1997)
http://dx.doi.org/10.1364/AO.36.004409


View Full Text Article

Enhanced HTML    Acrobat PDF (150 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The normal-incidence reflectance of high-density cast silicon carbide (SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. High reflectivity in the EUV is achieved. High reflectivity and the relatively low-cost manufacturing process make high-density cast SiC a promising mirror material for EUV applications.

© 1997 Optical Society of America

History
Original Manuscript: February 21, 1997
Revised Manuscript: April 10, 1997
Published: July 1, 1997

Citation
Ritva A. M. Keski-Kuha, Charles M. Fleetwood, and Joseph Robichaud, "Performance of high-density cast silicon carbide in the extreme ultraviolet," Appl. Opt. 36, 4409-4410 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-19-4409


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991). [CrossRef]
  2. R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988). [CrossRef] [PubMed]
  3. G. M. Blumenstock, R. A. M. Keski-Kuha, “Ion-beam-deposited boron carbide coatings for the extreme ultraviolet,” Appl. Opt. 33, 5962–5963 (1994). [CrossRef] [PubMed]
  4. R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997). [CrossRef]
  5. T. T. Saha, D. B. Leviton, P. Glenn, “Performance of ion-figured SiC SUMER telescope mirror in VUV,” Appl. Opt. 35, 1742–1750 (1996). [CrossRef] [PubMed]
  6. K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.
  7. K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995). [CrossRef]
  8. S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985). [CrossRef]
  9. SSG, Inc., 150 Bear Hill Road, Waltham, Mass. 02154.
  10. J. F. Osantowski, “Reflectance and optical constants for Cer-Vit from 250 to 1050 A,” J. Opt. Soc. Am. 64, 834–838 (1974). [CrossRef]
  11. Morton International, 185 New Boston St., Woburn, Mass. 01801.
  12. General Optics, Inc., 554 Flinn Ave., Moorpark, Calif. 93021.
  13. Sample provided by W. J. Choyke, Department of Physics, University of Pittsburgh, Pittsburgh, Pa. 15260 through Jean Bennett, Naval Weapons Center, China Lake, Calif. 93555.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited