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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 20 — Jul. 10, 1997
  • pp: 4666–4674

Excimer laser micromachining for rapid fabrication of diffractive optical elements

Gregory P. Behrmann and Michael T. Duignan  »View Author Affiliations


Applied Optics, Vol. 36, Issue 20, pp. 4666-4674 (1997)
http://dx.doi.org/10.1364/AO.36.004666


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Abstract

We demonstrate the fabrication of binary, multilevel, and blazed diffractive structures by a fast and flexible direct-write process by using an excimer-laser-based tabletop micromachining workstation with an integrated optical surface profiler.

© 1997 Optical Society of America

History
Original Manuscript: September 17, 1996
Revised Manuscript: December 3, 1996
Published: July 10, 1997

Citation
Gregory P. Behrmann and Michael T. Duignan, "Excimer laser micromachining for rapid fabrication of diffractive optical elements," Appl. Opt. 36, 4666-4674 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-20-4666


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References

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