OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 20 — Jul. 10, 1997
  • pp: 4675–4680

Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass

Walter Däschner, Pin Long, Robert Stein, Chuck Wu, and S. H. Lee  »View Author Affiliations


Applied Optics, Vol. 36, Issue 20, pp. 4675-4680 (1997)
http://dx.doi.org/10.1364/AO.36.004675


View Full Text Article

Enhanced HTML    Acrobat PDF (718 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present a method for reproducing diffractive optical elements in quantity. The method is compatible with VLSI microfabrication techniques and involves generating a gray-scale mask. The gray-scale mask is employed in an optical aligner to expose an analog photoresist on any environmentally durable substrate, e.g., glass, quartz, semiconductor, or metal, one exposure for each diffractive optical element. After copies of the mask on the photoresist are developed, many substrates can be processed in parallel in a chemically assisted ion-beam etcher to transfer the microstructures on the analog resists simultaneously onto the surfaces of the substrates.

© 1997 Optical Society of America

History
Original Manuscript: August 27, 1996
Revised Manuscript: November 25, 1996
Published: July 10, 1997

Citation
Walter Däschner, Pin Long, Robert Stein, Chuck Wu, and S. H. Lee, "Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass," Appl. Opt. 36, 4675-4680 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-20-4675

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited