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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 22 — Aug. 1, 1997
  • pp: 5388–5395

Automated high-speed Mueller matrix scatterometer

F. Delplancke  »View Author Affiliations


Applied Optics, Vol. 36, Issue 22, pp. 5388-5395 (1997)
http://dx.doi.org/10.1364/AO.36.005388


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Abstract

A new scatterometer–polarimeter is described. It measures the angular distribution of intensity and of the complete Mueller matrix of light scattered by rough surfaces and particle suspensions. The measurement time is 1 s/scattering angle in the present configuration but can be reduced to a few milliseconds with modified electronics. The instrument uses polarization modulation and a Fourier analysis of four detected signals to obtain the 16 Mueller matrix elements. This method is particularly well suited to online, real time, industrial process control involving rough surfaces and large particle suspensions (an arithmetic roughness or particle diameter of >1 µm). Some results are given.

© 1997 Optical Society of America

History
Original Manuscript: January 2, 1997
Revised Manuscript: April 9, 1997
Published: August 1, 1997

Citation
F. Delplancke, "Automated high-speed Mueller matrix scatterometer," Appl. Opt. 36, 5388-5395 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-22-5388

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