Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Automated high-speed Mueller matrix scatterometer

Not Accessible

Your library or personal account may give you access

Abstract

A new scatterometer–polarimeter is described. It measures the angular distribution of intensity and of the complete Mueller matrix of light scattered by rough surfaces and particle suspensions. The measurement time is 1 s/scattering angle in the present configuration but can be reduced to a few milliseconds with modified electronics. The instrument uses polarization modulation and a Fourier analysis of four detected signals to obtain the 16 Mueller matrix elements. This method is particularly well suited to online, real time, industrial process control involving rough surfaces and large particle suspensions (an arithmetic roughness or particle diameter of >1 µm). Some results are given.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Mueller-matrix ellipsometry using the division-of-amplitude photopolarimeter: a study of depolarization effects

Shankar Krishnan and Paul C. Nordine
Appl. Opt. 33(19) 4184-4192 (1994)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (18)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved