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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 22 — Aug. 1, 1997
  • pp: 5471–5475

Bidirectional reflectance distribution function of diffuse extreme ultraviolet scatterers and extreme ultraviolet baffle materials

Michael P. Newell and Ritva A. M. Keski-Kuha  »View Author Affiliations


Applied Optics, Vol. 36, Issue 22, pp. 5471-5475 (1997)
http://dx.doi.org/10.1364/AO.36.005471


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Abstract

Bidirectional reflectance distribution function (BRDF) measurements of a number of diffuse extreme ultraviolet (EUV) scatterers and EUV baffle materials have been performed with the Goddard EUV scatterometer. BRDF data are presented for white Spectralon SRS-99 at 121.6 nm; the data exhibit a non-Lambertian nature and a total hemispherical reflectance lower than 0.15. Data are also presented for an evaporated Cu black sample, a black Spectralon SRS-02 sample, and a Martin Optical Black sample at wavelengths of 58.4 and 121.6 nm and for angles of incidence of 15° and 45°. Overall Martin Optical Black exhibited the lowest BRDF characteristic, with a total hemispherical reflectance of the order of 0.01 and measured BRDF values as low as 2 × 10-3 sr-1.

© 1997 Optical Society of America

History
Original Manuscript: June 17, 1996
Revised Manuscript: December 2, 1996
Published: August 1, 1997

Citation
Michael P. Newell and Ritva A. M. Keski-Kuha, "Bidirectional reflectance distribution function of diffuse extreme ultraviolet scatterers and extreme ultraviolet baffle materials," Appl. Opt. 36, 5471-5475 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-22-5471


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