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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 23 — Aug. 10, 1997
  • pp: 5717–5727

Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection

J. Michael Miller, Nicole de Beaucoudrey, Pierre Chavel, Jari Turunen, and Edmond Cambril  »View Author Affiliations


Applied Optics, Vol. 36, Issue 23, pp. 5717-5727 (1997)
http://dx.doi.org/10.1364/AO.36.005717


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Abstract

We propose the use of binary slanted surface-relief gratings with parallel-groove walls as input and output couplers in a planar optical interconnect. Parametric optimization of cascaded output couplers is employed to design an interconnect consisting of N output couplers producing a uniform intensity distribution with a high efficiency that may be realized in one lithographic etching step. The sensitivity of a N = 4 interconnect to various fabrication errors is analyzed. We demonstrate the operation of a slanted surface-relief grating manufactured with electron-beam lithography and reactive-ion etching for an operating wavelength of λ = 0.633 μm.

© 1997 Optical Society of America

History
Original Manuscript: November 12, 1996
Revised Manuscript: March 27, 1997
Published: August 10, 1997

Citation
J. Michael Miller, Nicole de Beaucoudrey, Pierre Chavel, Jari Turunen, and Edmond Cambril, "Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection," Appl. Opt. 36, 5717-5727 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-23-5717

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