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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 28 — Oct. 1, 1997
  • pp: 7199–7203

Detection of defects in multiple-layer structures by using surface plasmon resonance

L. Lévesque and B. E. Paton  »View Author Affiliations


Applied Optics, Vol. 36, Issue 28, pp. 7199-7203 (1997)
http://dx.doi.org/10.1364/AO.36.007199


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Abstract

A method for diagnosing a silver–dielectric interface is proposed. This method relies on surface plasmon resonance at the Ag–dielectric interface. It yields a good estimate of an air gap between a thin Ag film and a polymer (dielectric). Detection of an air gap thickness of approximately half of the incident probing beam wavelength was monitored. Probing a small air gap is also discussed in the case of poor adhesion at the Ag–polymer interface.

© 1997 Optical Society of America

History
Original Manuscript: February 24, 1997
Revised Manuscript: May 19, 1997
Published: October 1, 1997

Citation
L. Lévesque and B. E. Paton, "Detection of defects in multiple-layer structures by using surface plasmon resonance," Appl. Opt. 36, 7199-7203 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-28-7199

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