A method for diagnosing a silver–dielectric interface is proposed. This method relies on surface plasmon resonance at the Ag–dielectric interface. It yields a good estimate of an air gap between a thin Ag film and a polymer (dielectric). Detection of an air gap thickness of approximately half of the incident probing beam wavelength was monitored. Probing a small air gap is also discussed in the case of poor adhesion at the Ag–polymer interface.
© 1997 Optical Society of America
Original Manuscript: February 24, 1997
Revised Manuscript: May 19, 1997
Published: October 1, 1997
L. Lévesque and B. E. Paton, "Detection of defects in multiple-layer structures by using surface plasmon resonance," Appl. Opt. 36, 7199-7203 (1997)