Allowable deviations in index profiles, dopant distributions, and concentration dependence of diffusion coefficients are determined for collimating microlenses. Examples of high (and low) numerical aperture lenses are given for silver/sodium (and lithium/sodium) ion exchanges. Using the full lens aperture, one can ensure diffraction-limited performance only when the index is measured to within 1.0 × 10-4 (4.3 × 10-5) of the optimum values. Fabrication tolerances for diffraction-limited performance over 80% of the numerical aperture are expressed in terms of the concentration-dependent diffusion coefficient, which typically must be held to within ±4.7% (±11.5%) of ideal values.
© 1997 Optical Society of America
Original Manuscript: February 14, 1997
Published: November 1, 1997
Bernhard Messerschmidt, Ulf Possner, and S. N. Houde-Walter, "Fabrication tolerances and metrology requirements for ion-exchanged micro-optic lenses: What’s good enough?," Appl. Opt. 36, 8145-8152 (1997)