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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 31 — Nov. 1, 1997
  • pp: 8145–8152

Fabrication tolerances and metrology requirements for ion-exchanged micro-optic lenses: What’s good enough?

Bernhard Messerschmidt, Ulf Possner, and S. N. Houde-Walter  »View Author Affiliations


Applied Optics, Vol. 36, Issue 31, pp. 8145-8152 (1997)
http://dx.doi.org/10.1364/AO.36.008145


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Abstract

Allowable deviations in index profiles, dopant distributions, and concentration dependence of diffusion coefficients are determined for collimating microlenses. Examples of high (and low) numerical aperture lenses are given for silver/sodium (and lithium/sodium) ion exchanges. Using the full lens aperture, one can ensure diffraction-limited performance only when the index is measured to within 1.0 × 10-4 (4.3 × 10-5) of the optimum values. Fabrication tolerances for diffraction-limited performance over 80% of the numerical aperture are expressed in terms of the concentration-dependent diffusion coefficient, which typically must be held to within ±4.7% (±11.5%) of ideal values.

© 1997 Optical Society of America

History
Original Manuscript: February 14, 1997
Published: November 1, 1997

Citation
Bernhard Messerschmidt, Ulf Possner, and S. N. Houde-Walter, "Fabrication tolerances and metrology requirements for ion-exchanged micro-optic lenses: What’s good enough?," Appl. Opt. 36, 8145-8152 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-31-8145

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