Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Proposal for ellipsometer configurations allowing phase-sensitive detection

Not Accessible

Your library or personal account may give you access

Abstract

We propose ellipsometer configurations where, by conveniently modulating either the input or the output polarization, one can determine the ellipsometric parameters, Δ and ψ, purely from phase measurements on two harmonic components of the signal from a single detector. Such phase measurements are less sensitive to noise than the conventional amplitude measurements, and the proposed modulation techniques can allow the achievement of frequencies up to tens of megahertz. Thus a very good time resolution is achieved.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Null ellipsometer with phase modulation

K. Postava, A. Maziewski, T. Yamaguchi, R. Ossikovski, Š Višňovskí, and J. Pištora
Opt. Express 12(24) 6040-6045 (2004)

Two-channel polarization modulation ellipsometer

Gerald E. Jellison and F. A. Modine
Appl. Opt. 29(7) 959-974 (1990)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (22)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved