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Applied Optics

Applied Optics


  • Vol. 36, Iss. 32 — Nov. 10, 1997
  • pp: 8481–8489

Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

Fredrik Nikolajeff, Sverker Hård, and Bernard Curtis  »View Author Affiliations

Applied Optics, Vol. 36, Issue 32, pp. 8481-8489 (1997)

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A diffractive beam homogenizer, based on an array of square, off-axis, continuous-relief diffractive microlenses, for use with an excimer laser has been studied. We originally fabricated the homogenizer by direct-write electron-beam lithography, from which we made replicas in UV-grade fused silica by hot embossing and reactive ion etching. Atomic force microscopy measurements of original and replicated elements showed the accuracy of the replication fidelity. One of the replicated homogenizers was evaluated together with a KrF excimer laser. The homogenized beam had a flat-top profile with 31% of the beam energy contained within an area where the beam intensity was above a threshold level of 90% of the maximum intensity.

© 1997 Optical Society of America

Original Manuscript: December 16, 1996
Revised Manuscript: March 21, 1997
Published: November 10, 1997

Fredrik Nikolajeff, Sverker Hård, and Bernard Curtis, "Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing," Appl. Opt. 36, 8481-8489 (1997)

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